Dougyong SUNG

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma etching method and semiconductor device fabrication method i...
- Patent number 12,020,903
- Issue date Jun 25, 2024
- Samsung Electronics Co., Ltd.
- Yonghee Kim
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,948,777
- Issue date Apr 2, 2024
- Samsung Electronics Co., Ltd.
- Yonghee Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching apparatus, plasma etching method, and semiconductor...
- Patent number 11,658,039
- Issue date May 23, 2023
- Samsung Electronics Co., Ltd.
- Kyuho Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,605,529
- Issue date Mar 14, 2023
- Samsung Electronics Co., Ltd.
- Hakyoung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and semiconductor device fabrication method i...
- Patent number 11,545,341
- Issue date Jan 3, 2023
- Samsung Electronics Co., Ltd.
- Yonghee Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection module, substrate processing apparatus, and method of...
- Patent number 11,384,433
- Issue date Jul 12, 2022
- Samsung Electronics Co., Ltd.
- Minkyu Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma control apparatus and plasma processing system including the...
- Patent number 11,282,679
- Issue date Mar 22, 2022
- Samsung Electronics Co., Ltd.
- Donghyeon Na
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply assembly and substrate processing apparatus including th...
- Patent number 11,251,022
- Issue date Feb 15, 2022
- Samsung Electronics Co., Ltd.
- Kangmin Jeon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching and method of fabricating semiconductor de...
- Patent number 11,075,089
- Issue date Jul 27, 2021
- Samsung Electronics Co., Ltd.
- Hoyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching and method of fabricating semiconductor de...
- Patent number 11,075,088
- Issue date Jul 27, 2021
- Samsung Electronics Co., Ltd.
- Hoyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antennas, circuits for generating plasma, plasma processing apparat...
- Patent number 10,971,333
- Issue date Apr 6, 2021
- Samsung Electronics Co., Ltd.
- Dong-Hyub Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection module, substrate processing apparatus, and method of...
- Patent number 10,934,621
- Issue date Mar 2, 2021
- Samsung Electronics Co., Ltd.
- Minkyu Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucks and substrate processing apparatus including t...
- Patent number 10,896,838
- Issue date Jan 19, 2021
- Samsung Electronics Co., Ltd.
- Minsung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and me...
- Patent number 10,892,145
- Issue date Jan 12, 2021
- Samsung Electronics Co., Ltd.
- Sejin Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck, substrate processing apparatus, and method of...
- Patent number 10,854,485
- Issue date Dec 1, 2020
- Samsung Electronics Co., Ltd.
- Minsung Kim
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method of plasma etching and method of fabricating semiconductor de...
- Patent number 10,622,217
- Issue date Apr 14, 2020
- Samsung Electronics Co., Ltd.
- Hoyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck, substrate processing apparatus, and method of...
- Patent number 10,522,374
- Issue date Dec 31, 2019
- Samsung Electronics Co., Ltd.
- Minsung Kim
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chucks and substrate processing apparatus including t...
- Patent number 10,224,228
- Issue date Mar 5, 2019
- Samsung Electronics Co., Ltd.
- Minsung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of fabricating semiconductor devices including performing a...
- Patent number 9,691,618
- Issue date Jun 27, 2017
- Samsung Electronics Co., Ltd.
- Dougyong Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate manufacturing method and substrate manufacturing apparatus
- Patent number 9,355,857
- Issue date May 31, 2016
- Samsung Electronics Co., Ltd.
- Kangmin Jeon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA DENSITY MEASUREMENT SENSOR, APPARATUS FOR MEASURING REAL-TIM...
- Publication number 20240274418
- Publication date Aug 15, 2024
- Samsung Electronics Co., Ltd.
- Sungho Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240234093
- Publication date Jul 11, 2024
- Samsung Electronics Co., Ltd.
- Sejin OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...
- Publication number 20240159657
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Sejin OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SENSOR MODULE
- Publication number 20240071737
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- Sungwon Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230402258
- Publication date Dec 14, 2023
- Samsung Electronics Co., Ltd.
- Yunhwan KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230317418
- Publication date Oct 5, 2023
- Samsung Electronics Co., Ltd.
- Jungmin KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
- Publication number 20230187178
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- Youngil KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCK ASSEMBLY, FABRICATION SYSTEM THEREWITH, AND METHOD OF FABRICA...
- Publication number 20230145476
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- Seongha JEONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING PLURALITY OF ELECTRODES
- Publication number 20230100582
- Publication date Mar 30, 2023
- Samsung Electronics Co., Ltd.
- Yunhwan KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20230078095
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Dougyong SUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...
- Publication number 20230084124
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Yonghee KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPEDANCE MEASUREMENT JIG AND METHOD OF CONTROLLING A SUBSTRATE-PRO...
- Publication number 20230010881
- Publication date Jan 12, 2023
- Samsung Electronics Co., Ltd.
- Byeongsang KIM
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230005713
- Publication date Jan 5, 2023
- Samsung Electronics Co., Ltd.
- Yonghee KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220051873
- Publication date Feb 17, 2022
- Samsung Electronics Co., Ltd.
- Hakyoung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD, AND SEMICONDUCTOR...
- Publication number 20220020597
- Publication date Jan 20, 2022
- Samsung Electronics Co., Ltd.
- KYUHO KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNAS, CIRCUITS FOR GENERATING PLASMA, PLASMA PROCESSING APPARAT...
- Publication number 20210183618
- Publication date Jun 17, 2021
- Samsung Electronics Co., Ltd.
- Dong-Hyub LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTION MODULE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...
- Publication number 20210147982
- Publication date May 20, 2021
- Samsung Electronics Co., Ltd.
- MINKYU SUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...
- Publication number 20210104381
- Publication date Apr 8, 2021
- Samsung Electronics Co., Ltd.
- Kangmin JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...
- Publication number 20210104382
- Publication date Apr 8, 2021
- Samsung Electronics Co., Ltd.
- Yonghee KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE...
- Publication number 20200373126
- Publication date Nov 26, 2020
- Samsung Electronics Co., Ltd.
- Donghyeon NA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...
- Publication number 20200234964
- Publication date Jul 23, 2020
- Samsung Electronics Co., Ltd.
- Hoyong PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...
- Publication number 20200234965
- Publication date Jul 23, 2020
- Samsung Electronics Co., Ltd.
- Hoyong PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20200168443
- Publication date May 28, 2020
- Samsung Electronics Co., Ltd.
- SEJIN OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTION MODULE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...
- Publication number 20200157682
- Publication date May 21, 2020
- Samsung Electronics Co., Ltd.
- MINKYU SUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...
- Publication number 20200126827
- Publication date Apr 23, 2020
- Samsung Electronics Co., Ltd.
- Minsung Kim
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ELECTROSTATIC CHUCKS AND SUBSTRATE PROCESSING APPARATUS INCLUDING T...
- Publication number 20190148205
- Publication date May 16, 2019
- Samsung Electronics Co., Ltd.
- Minsung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...
- Publication number 20190013222
- Publication date Jan 10, 2019
- Samsung Electronics Co., Ltd.
- Minsung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SYSTEM AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USIN...
- Publication number 20180182600
- Publication date Jun 28, 2018
- Samsung Electronics Co., Ltd.
- MinKyu SOHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC WINDOW, PLASMA SYSTEM THEREWITH, METHOD OF FABRICATING D...
- Publication number 20180174802
- Publication date Jun 21, 2018
- Samsung Electronics Co., Ltd.
- Seungkyu LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Antennas, Circuits for Generating Plasma, Plasma Processing Apparat...
- Publication number 20180114675
- Publication date Apr 26, 2018
- Samsung Electronics Co., Ltd.
- Dong-Hyub LEE
- H01 - BASIC ELECTRIC ELEMENTS

Dougyong SUNG

Person

Patents Grantslast 30 patents

Plasma etching method and semiconductor device fabrication method i...

Method of manufacturing semiconductor device

Plasma etching apparatus, plasma etching method, and semiconductor...

Plasma processing apparatus

Plasma etching method and semiconductor device fabrication method i...

Gas injection module, substrate processing apparatus, and method of...

Plasma control apparatus and plasma processing system including the...

Gas supply assembly and substrate processing apparatus including th...

Method of plasma etching and method of fabricating semiconductor de...

Method of plasma etching and method of fabricating semiconductor de...

Antennas, circuits for generating plasma, plasma processing apparat...

Gas injection module, substrate processing apparatus, and method of...

Electrostatic chucks and substrate processing apparatus including t...

Substrate processing apparatus, substrate processing method, and me...

Electrostatic chuck, substrate processing apparatus, and method of...

Method of plasma etching and method of fabricating semiconductor de...

Electrostatic chuck, substrate processing apparatus, and method of...

Electrostatic chucks and substrate processing apparatus including t...

Methods of fabricating semiconductor devices including performing a...

Substrate manufacturing method and substrate manufacturing apparatus

Patents Applicationslast 30 patents

PLASMA DENSITY MEASUREMENT SENSOR, APPARATUS FOR MEASURING REAL-TIM...

SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT...

PLASMA SENSOR MODULE

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

CHUCK ASSEMBLY, FABRICATION SYSTEM THEREWITH, AND METHOD OF FABRICA...

SUBSTRATE PROCESSING APPARATUS INCLUDING PLURALITY OF ELECTRODES

PLASMA ETCHING APPARATUS AND SEMICONDUCTOR PROCESSING SYSTEM

PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...

IMPEDANCE MEASUREMENT JIG AND METHOD OF CONTROLLING A SUBSTRATE-PRO...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PLASMA PROCESSING APPARATUS

PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD, AND SEMICONDUCTOR...

ANTENNAS, CIRCUITS FOR GENERATING PLASMA, PLASMA PROCESSING APPARAT...

GAS INJECTION MODULE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...

GAS SUPPLY ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...

PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...

PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE...

METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...

METHOD OF PLASMA ETCHING AND METHOD OF FABRICATING SEMICONDUCTOR DE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

GAS INJECTION MODULE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...

ELECTROSTATIC CHUCK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...

ELECTROSTATIC CHUCKS AND SUBSTRATE PROCESSING APPARATUS INCLUDING T...

ELECTROSTATIC CHUCK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF...

PLASMA SYSTEM AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USIN...

DIELECTRIC WINDOW, PLASMA SYSTEM THEREWITH, METHOD OF FABRICATING D...

Antennas, Circuits for Generating Plasma, Plasma Processing Apparat...