Doyle E. Bennett

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Technique for training neural network for use in in-situ monitoring...
- Patent number 12,136,574
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Trained neural network in in-situ monitoring during polishing and p...
- Patent number 12,057,354
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Technique for training neural network for use in in-situ monitoring...
- Patent number 11,791,224
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Using a trained neural network for use in in-situ monitoring during...
- Patent number 11,658,078
- Issue date May 23, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determination of gain for eddy current sensor
- Patent number 10,556,315
- Issue date Feb 11, 2020
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Determination of gain for eddy current sensor
- Patent number 10,207,386
- Issue date Feb 19, 2019
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Adjusting eddy current measurements
- Patent number 9,636,797
- Issue date May 2, 2017
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Determination of gain for eddy current sensor
- Patent number 9,281,253
- Issue date Mar 8, 2016
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Determination of gain for eddy current sensor
- Patent number 9,275,917
- Issue date Mar 1, 2016
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Multi-platen multi-head polishing architecture
- Patent number 9,227,293
- Issue date Jan 5, 2016
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Endpointing with selective spectral monitoring
- Patent number 9,221,147
- Issue date Dec 29, 2015
- Applied Materials, Inc.
- Jun Qian
- B24 - GRINDING POLISHING
Information Patent Grant
In-situ monitoring system with monitoring of elongated region
- Patent number 9,205,527
- Issue date Dec 8, 2015
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Path for probe of spectrographic metrology system
- Patent number 9,056,383
- Issue date Jun 16, 2015
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring and articles for carrier head
- Patent number 8,535,121
- Issue date Sep 17, 2013
- Applied Materials, Inc.
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Grant
Method of making and apparatus having windowless polishing pad and...
- Patent number 8,465,342
- Issue date Jun 18, 2013
- Applied Materials, Inc.
- Jimin Zhang
- B24 - GRINDING POLISHING
Information Patent Grant
Eddy current gain compensation
- Patent number 8,408,965
- Issue date Apr 2, 2013
- Applied Materials, Inc.
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Grant
Molding windows in thin pads
- Patent number 8,393,940
- Issue date Mar 12, 2013
- Applied Materials, Inc.
- Boguslaw A Swedek
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring and articles for carrier head
- Patent number 8,376,813
- Issue date Feb 19, 2013
- Applied Materials, Inc.
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Grant
Reducing polishing pad deformation
- Patent number 8,287,330
- Issue date Oct 16, 2012
- Applied Materials, Inc.
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Grant
Automatic gain control
- Patent number 8,187,977
- Issue date May 29, 2012
- Applied Materials, Inc.
- Boguslaw A. Swedek
- B24 - GRINDING POLISHING
Information Patent Grant
Method of making and apparatus having windowless polishing pad and...
- Patent number 8,157,614
- Issue date Apr 17, 2012
- Applied Materials, Inc.
- Jimin Zhang
- B24 - GRINDING POLISHING
Information Patent Grant
Reducing polishing pad deformation
- Patent number 7,621,798
- Issue date Nov 24, 2009
- Applied Materials, Inc.
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Grant
Automatic gain control
- Patent number 7,494,929
- Issue date Feb 24, 2009
- Applied Materials, Inc.
- Boguslaw A. Swedek
- B24 - GRINDING POLISHING
Information Patent Grant
Reducing polishing pad deformation
- Patent number 7,354,334
- Issue date Apr 8, 2008
- Applied Materials, Inc.
- Manoocher Birang
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head vibration damping
- Patent number 7,255,637
- Issue date Aug 14, 2007
- Applied Materials, Inc.
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Grant
Feedback controlled polishing processes
- Patent number 7,247,080
- Issue date Jul 24, 2007
- Applied Materials, Inc.
- Doyle E. Bennett
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Chemical mechanical polishing control system and method
- Patent number 7,074,109
- Issue date Jul 11, 2006
- Applied Materials
- Doyle E Bennett
- B24 - GRINDING POLISHING
Information Patent Grant
Feedback controlled polishing processes
- Patent number 7,024,268
- Issue date Apr 4, 2006
- Applied Materials Inc.
- Doyle E. Bennett
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Chemical mechanical polishing with multi-stage monitoring of metal...
- Patent number 6,991,516
- Issue date Jan 31, 2006
- Applied Materials Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus with non-conductive elements
- Patent number 6,945,845
- Issue date Sep 20, 2005
- Applied Materials, Inc.
- Doyle E Bennett
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
- Publication number 20240014080
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TRAINED NEURAL NETWORK IN IN-SITU MONITORING DURING POLISHING AND P...
- Publication number 20230290691
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPENSATION FOR SUBSTRATE DOPING IN EDGE RECONSTRUCTION FOR IN-SIT...
- Publication number 20210379723
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
USING A TRAINED NEURAL NETWORK FOR USE IN IN-SITU MONITORING DURING...
- Publication number 20210358819
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
- Publication number 20210354265
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Kun Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
- Publication number 20190134775
- Publication date May 9, 2019
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
- Publication number 20160158908
- Publication date Jun 9, 2016
- Applied Materials, Inc.
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Platen Multi-Head Polishing Architecture
- Publication number 20160101497
- Publication date Apr 14, 2016
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
ADJUSTING EDDY CURRENT MEASUREMENTS
- Publication number 20150224623
- Publication date Aug 13, 2015
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
- Publication number 20150118766
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR
- Publication number 20150118765
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Kun Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATH FOR PROBE OF SPECTROGRAPHIC METROLOGY SYSTEM
- Publication number 20140242879
- Publication date Aug 28, 2014
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
DETERMINATION OF WAFER ANGULAR POSITION FOR IN-SEQUENCE METROLOGY
- Publication number 20140242883
- Publication date Aug 28, 2014
- Applied Materials, Inc.
- Benjamin Cherian
- B24 - GRINDING POLISHING
Information Patent Application
FEED FORWARD PARAMETER VALUES FOR USE IN THEORETICALLY GENERATING S...
- Publication number 20140242881
- Publication date Aug 28, 2014
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
Polishing System with In-Sequence Sensor
- Publication number 20140141696
- Publication date May 22, 2014
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
Multi-Platen Multi-Head Polishing Architecture
- Publication number 20140141695
- Publication date May 22, 2014
- Applied Materials, Inc.
- Jeffrey Drue David
- B24 - GRINDING POLISHING
Information Patent Application
IN-SITU MONITORING SYSTEM WITH MONITORING OF ELONGATED REGION
- Publication number 20140127971
- Publication date May 8, 2014
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Application
ENDPOINTING WITH SELECTIVE SPECTRAL MONITORING
- Publication number 20140113524
- Publication date Apr 24, 2014
- Jun Qian
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING AND ARTICLES FOR CARRIER HEAD
- Publication number 20130157549
- Publication date Jun 20, 2013
- Applied Materials, Inc., a Delaware corporation
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Application
Method of Making and Apparatus Having Windowless Polishing Pad and...
- Publication number 20120258649
- Publication date Oct 11, 2012
- Jimin Zhang
- B24 - GRINDING POLISHING
Information Patent Application
Automatic Gain Control
- Publication number 20120227903
- Publication date Sep 13, 2012
- Applied Materials, Inc.
- Boguslaw A. Swedek
- B24 - GRINDING POLISHING
Information Patent Application
Molding Windows in Thin Pads
- Publication number 20110256818
- Publication date Oct 20, 2011
- Applied Materials, Inc.
- Boguslaw A. Swedek
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF MAKING AND APPARATUS HAVING WINDOWLESS POLISHING PAD AND...
- Publication number 20100279585
- Publication date Nov 4, 2010
- APPLIED MATERIALS, INC.
- Jimin Zhang
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING AND ARTICLES FOR CARRIER HEAD
- Publication number 20100144255
- Publication date Jun 10, 2010
- Applied Materials, Inc., a Delaware corporation
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Application
Eddy Current Gain Compensation
- Publication number 20100099334
- Publication date Apr 22, 2010
- APPLIED MATERIALS, INC.
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Application
Automatic Gain Control
- Publication number 20090156098
- Publication date Jun 18, 2009
- APPLIED MATERIALS, INC.
- Boguslaw A. Swedek
- B24 - GRINDING POLISHING
Information Patent Application
REATAINING RING AND ARTICLES FOR CARRIER HEAD
- Publication number 20080039000
- Publication date Feb 14, 2008
- Applied Materials, Inc.
- Doyle E. Bennett
- B24 - GRINDING POLISHING
Information Patent Application
REDUCING POLISHING PAD DEFORMATION
- Publication number 20080020690
- Publication date Jan 24, 2008
- Applied Materials, Inc.
- Manoocher Birang
- B24 - GRINDING POLISHING
Information Patent Application
Automatic gain control
- Publication number 20070251922
- Publication date Nov 1, 2007
- APPLIED MATERIALS, INC.
- Boguslaw A. Swedek
- B24 - GRINDING POLISHING
Information Patent Application
Continuous in-line monitoring and qualification of polishing rates
- Publication number 20070123046
- Publication date May 31, 2007
- APPLIED MATERIALS, INC.
- Abraham Ravid
- B24 - GRINDING POLISHING

Doyle E. Bennett

Person

Patents Grantslast 30 patents

Technique for training neural network for use in in-situ monitoring...

Trained neural network in in-situ monitoring during polishing and p...

Technique for training neural network for use in in-situ monitoring...

Using a trained neural network for use in in-situ monitoring during...

Determination of gain for eddy current sensor

Determination of gain for eddy current sensor

Adjusting eddy current measurements

Determination of gain for eddy current sensor

Determination of gain for eddy current sensor

Multi-platen multi-head polishing architecture

Endpointing with selective spectral monitoring

In-situ monitoring system with monitoring of elongated region

Path for probe of spectrographic metrology system

Retaining ring and articles for carrier head

Method of making and apparatus having windowless polishing pad and...

Eddy current gain compensation

Molding windows in thin pads

Retaining ring and articles for carrier head

Reducing polishing pad deformation

Automatic gain control

Method of making and apparatus having windowless polishing pad and...

Reducing polishing pad deformation

Automatic gain control

Reducing polishing pad deformation

Carrier head vibration damping

Feedback controlled polishing processes

Chemical mechanical polishing control system and method

Feedback controlled polishing processes

Chemical mechanical polishing with multi-stage monitoring of metal...

Chemical mechanical polishing apparatus with non-conductive elements

Patents Applicationslast 30 patents

TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...

TRAINED NEURAL NETWORK IN IN-SITU MONITORING DURING POLISHING AND P...

COMPENSATION FOR SUBSTRATE DOPING IN EDGE RECONSTRUCTION FOR IN-SIT...

USING A TRAINED NEURAL NETWORK FOR USE IN IN-SITU MONITORING DURING...

TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

Multi-Platen Multi-Head Polishing Architecture

ADJUSTING EDDY CURRENT MEASUREMENTS

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

DETERMINATION OF GAIN FOR EDDY CURRENT SENSOR

PATH FOR PROBE OF SPECTROGRAPHIC METROLOGY SYSTEM

DETERMINATION OF WAFER ANGULAR POSITION FOR IN-SEQUENCE METROLOGY

FEED FORWARD PARAMETER VALUES FOR USE IN THEORETICALLY GENERATING S...

Polishing System with In-Sequence Sensor

Multi-Platen Multi-Head Polishing Architecture

IN-SITU MONITORING SYSTEM WITH MONITORING OF ELONGATED REGION

ENDPOINTING WITH SELECTIVE SPECTRAL MONITORING

RETAINING RING AND ARTICLES FOR CARRIER HEAD

Method of Making and Apparatus Having Windowless Polishing Pad and...

Automatic Gain Control

Molding Windows in Thin Pads

METHOD OF MAKING AND APPARATUS HAVING WINDOWLESS POLISHING PAD AND...

RETAINING RING AND ARTICLES FOR CARRIER HEAD

Eddy Current Gain Compensation

Automatic Gain Control

REATAINING RING AND ARTICLES FOR CARRIER HEAD

REDUCING POLISHING PAD DEFORMATION

Automatic gain control

Continuous in-line monitoring and qualification of polishing rates