Dries SMEETS

Follow

Person

Hasselt, BE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical element and optical system for EUV lithography, and method...
- Patent number 10,690,812
- Issue date Jun 23, 2020
- Carl Zeiss SMT GmbH
- Hermanus Hendricus Petrus Theodorus Bekman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radiation modulator for a lithography apparatus, a lithography appa...
- Patent number 9,823,576
- Issue date Nov 21, 2017
- ASML Netherlands B.V.
- Dries Smeets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device, lithographic apparatus, method for guiding radiation and de...
- Patent number 9,715,183
- Issue date Jul 25, 2017
- ASML Netherlands B.V.
- Wouter Dick Koek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ELEMENT AND OPTICAL SYSTEM FOR EUV LITHOGRAPHY, AND METHOD...
- Publication number 20160187543
- Publication date Jun 30, 2016
- Carl Zeiss SMT GMBH
- Hermanus Hendricus Petrus Theodorus BEKMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE, LITHOGRAPHIC APPARATUS, METHOD FOR GUIDING RADIATION AND DE...
- Publication number 20140347641
- Publication date Nov 27, 2014
- ASML NETHERLANDS B.V.
- Wouter Dick Koek
- G02 - OPTICS
Information Patent Application
RADIATION MODULATOR FOR A LITHOGRAPHY APPARATUS, A LITHOGRAPHY APPA...
- Publication number 20140211189
- Publication date Jul 31, 2014
- ASML NETHERLANDS B.V.
- Dries SMEETS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY