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Rehovot, IL
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Patents Grants
last 30 patents
Information
Patent Grant
Accuracy improvements in optical metrology
Patent number
11,862,522
Issue date
Jan 2, 2024
Barak Bringoltz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device metrology targets and methods
Patent number
11,054,752
Issue date
Jul 6, 2021
KLA Corporation
Eran Amit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device metrology targets and methods
Patent number
10,571,811
Issue date
Feb 25, 2020
KLA-Tencor Corporation
Eran Amit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay control with non-zero offset prediction
Patent number
10,409,171
Issue date
Sep 10, 2019
KLA-Tencor Corporation
Michael E. Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ACCURACY IMPROVEMENTS IN OPTICAL METROLOGY
Publication number
20210175132
Publication date
Jun 10, 2021
KLA-Tencor Corporation
Barak Bringoltz
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEVICE METROLOGY TARGETS AND METHODS
Publication number
20190004438
Publication date
Jan 3, 2019
KLA-Tencor Corporation
Eran Amit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Overlay Control with Non-Zero Offset Prediction
Publication number
20180253017
Publication date
Sep 6, 2018
KLA-Tencor Corporation
Michael E. Adel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACCURACY IMPROVEMENTS IN OPTICAL METROLOGY
Publication number
20180047646
Publication date
Feb 15, 2018
KLA-Tencor Corporation
Barak Bringoltz
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEVICE METROLOGY TARGETS AND METHODS
Publication number
20160266505
Publication date
Sep 15, 2016
KLA-Tencor Corporation
Eran Amit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY