Duane Outka

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chamber component cleanliness measurement system
- Patent number 12,072,318
- Issue date Aug 27, 2024
- Lam Research Corporation
- Amir A. Yasseri
- B08 - CLEANING
Information Patent Grant
Conditioning chamber component
- Patent number 12,064,795
- Issue date Aug 20, 2024
- Lam Research Corporation
- Amir A. Yasseri
- B08 - CLEANING
Information Patent Grant
Method for conditioning a ceramic coating
- Patent number 11,384,430
- Issue date Jul 12, 2022
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to selectively pattern a surface for plasma resistant coat a...
- Patent number 11,124,659
- Issue date Sep 21, 2021
- Lam Research Corporation
- Amir A. Yasseri
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Conditioning chamber component
- Patent number 10,967,407
- Issue date Apr 6, 2021
- Lam Research Corporation
- Amir A. Yasseri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating a nonhomogenous surface
- Patent number 9,766,063
- Issue date Sep 19, 2017
- Lam Research Corporation
- Amir Yasseri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method for gas delivery system
- Patent number 9,689,533
- Issue date Jun 27, 2017
- Lam Research Corporation
- Ian Kenworthy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adapter plate for polishing and cleaning electrodes
- Patent number 9,393,666
- Issue date Jul 19, 2016
- Lam Research Corporation
- Catherine Zhou
- B24 - GRINDING POLISHING
Information Patent Grant
Method of wet cleaning aluminum chamber parts
- Patent number 9,387,521
- Issue date Jul 12, 2016
- Lam Research Corporation
- Hong Shih
- B24 - GRINDING POLISHING
Information Patent Grant
Corrosion resistant aluminum coating on plasma chamber components
- Patent number 9,337,002
- Issue date May 10, 2016
- Lam Research Corporation
- John Daugherty
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Platen and adapter assemblies for facilitating silicon electrode po...
- Patent number 9,120,201
- Issue date Sep 1, 2015
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
Bare aluminum baffles for resist stripping chambers
- Patent number 8,859,432
- Issue date Oct 14, 2014
- Lam Research Corporation
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating method for gas delivery system
- Patent number 8,852,685
- Issue date Oct 7, 2014
- Lam Research Corporation
- Ian Kenworthy
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Extending lifetime of yttrium oxide as a plasma chamber material
- Patent number 8,585,844
- Issue date Nov 19, 2013
- Lam Research Corporation
- Hong Shih
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrode carrier assemblies
- Patent number 8,580,079
- Issue date Nov 12, 2013
- Lam Research Corporation
- Cliff La Croix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen and adapter assemblies for facilitating silicon electrode po...
- Patent number 8,550,880
- Issue date Oct 8, 2013
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
Method of cleaning aluminum plasma chamber parts
- Patent number 8,545,639
- Issue date Oct 1, 2013
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Electrode securing platens and electrode polishing assemblies incor...
- Patent number 8,444,456
- Issue date May 21, 2013
- Lam Research Corporation
- Cliff La Croix
- B24 - GRINDING POLISHING
Information Patent Grant
Bare aluminum baffles for resist stripping chambers
- Patent number 8,313,635
- Issue date Nov 20, 2012
- Lam Research Corporation
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrode transporter and fixture sets incorporating the same
- Patent number 8,276,898
- Issue date Oct 2, 2012
- Lam Research Corporation
- Armen Avoyan
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Peripherally engaging electrode carriers and assemblies incorporati...
- Patent number 8,276,604
- Issue date Oct 2, 2012
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of bonded silicon electrodes
- Patent number 8,221,552
- Issue date Jul 17, 2012
- Lam Research Corporation
- Duane Outka
- B08 - CLEANING
Information Patent Grant
Extending storage time of removed plasma chamber components prior t...
- Patent number 8,216,388
- Issue date Jul 10, 2012
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Backside mounted electrode carriers and assemblies incorporating th...
- Patent number 8,171,877
- Issue date May 8, 2012
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extending lifetime of yttrium oxide as a plasma chamber material
- Patent number 8,097,105
- Issue date Jan 17, 2012
- Lam Research Corporation
- Hong Shih
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Immersive oxidation and etching process for cleaning silicon electr...
- Patent number 8,075,703
- Issue date Dec 13, 2011
- Lam Research Corporation
- Armen Avoyan
- B24 - GRINDING POLISHING
Information Patent Grant
Processes for reconditioning multi-component electrodes
- Patent number 8,075,701
- Issue date Dec 13, 2011
- Lam Research Corporation
- Armen Avoyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extending storage time of removed plasma chamber components prior t...
- Patent number 7,976,641
- Issue date Jul 12, 2011
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bare aluminum baffles for resist stripping chambers
- Patent number 7,811,409
- Issue date Oct 12, 2010
- Lam Research Corporation
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning fixtures and methods of cleaning electrode assembly plenums
- Patent number 7,736,441
- Issue date Jun 15, 2010
- Lam Research Corporation
- Duane Outka
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20240383017
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
PLASMA PROCESSING CHAMBER WITH MULTILAYER PROTECTIVE SURFACE
- Publication number 20230138555
- Publication date May 4, 2023
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM
- Publication number 20220252548
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING PARTICLES
- Publication number 20210341377
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CONDITIONING A CERAMIC COATING
- Publication number 20210280393
- Publication date Sep 9, 2021
- LAM RESEARCH CORPORATION
- Hong SHIH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20210205858
- Publication date Jul 8, 2021
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO SELECTIVELY PATTERN A SURFACE FOR PLASMA RESISTANT COAT A...
- Publication number 20190233658
- Publication date Aug 1, 2019
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20180318890
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
METHOD FOR TREATING A NONHOMOGENOUS SURFACE
- Publication number 20170074646
- Publication date Mar 16, 2017
- LAM RESEARCH CORPORATION
- Amir Yasseri
- G01 - MEASURING TESTING
Information Patent Application
ADAPTER PLATE FOR POLISHING AND CLEANING ELECTRODES
- Publication number 20150179416
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Catherine Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD FOR GAS DELIVERY SYSTEM
- Publication number 20140366968
- Publication date Dec 18, 2014
- Ian Kenworthy
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS
- Publication number 20140272459
- Publication date Sep 18, 2014
- LAM RESEARCH CORPORATION
- John Daugherty
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS
- Publication number 20140150819
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- B08 - CLEANING
Information Patent Application
TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER...
- Publication number 20140113453
- Publication date Apr 24, 2014
- LAM RESEARCH CORPORATION
- Hong Shih
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...
- Publication number 20140030966
- Publication date Jan 30, 2014
- LAM RESEARCH CORPORATION
- Armen Avoyan
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS
- Publication number 20130104930
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS
- Publication number 20130056022
- Publication date Mar 7, 2013
- LAM RESEARCH CORPORATION
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTENDING LIFETIME OF YTTRIUM OXIDE AS A PLASMA CHAMBER MATERIAL
- Publication number 20120144640
- Publication date Jun 14, 2012
- LAM RESEARCH CORPORATION
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode Securing Platens And Electrode Polishing Assemblies Incor...
- Publication number 20120108152
- Publication date May 3, 2012
- LAM RESEARCH CORPORATION
- Cliff La Croix
- B24 - GRINDING POLISHING
Information Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
- Publication number 20120013242
- Publication date Jan 19, 2012
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode Carrier Assemblies
- Publication number 20110308732
- Publication date Dec 22, 2011
- LAM RESEARCH CORPORATION
- Cliff La Croix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD FOR GAS DELIVERY SYSTEM
- Publication number 20110259519
- Publication date Oct 27, 2011
- LAM RESEARCH CORPORATION
- Ian Kenworthy
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
EXTENDING STORAGE TIME OF REMOVED PLASMA CHAMBER COMPONENTS PRIOR T...
- Publication number 20110232678
- Publication date Sep 29, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR WET CLEANING QUARTZ SURFACES OF COMPONENTS FOR PLASMA P...
- Publication number 20110146909
- Publication date Jun 23, 2011
- LAM RESEARCH CORPORATION
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS
- Publication number 20100319813
- Publication date Dec 23, 2010
- LAM RESEARCH CORPORATION
- Fred D. Egley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMMERSIVE OXIDATION AND ETCHING PROCESS FOR CLEANING SILICON ELECTR...
- Publication number 20100139692
- Publication date Jun 10, 2010
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...
- Publication number 20100144246
- Publication date Jun 10, 2010
- LAM RESEARCH CORPORATION
- Armen Avoyan
- B08 - CLEANING
Information Patent Application
PROCESSES FOR RECONDITIONING MULTI-COMPONENT ELECTRODES
- Publication number 20090325320
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Armen Avoyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATI...
- Publication number 20090321018
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
- Publication number 20090322199
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS

Duane Outka

Person

Patents Grantslast 30 patents

Chamber component cleanliness measurement system

Conditioning chamber component

Method for conditioning a ceramic coating

Method to selectively pattern a surface for plasma resistant coat a...

Conditioning chamber component

Method for treating a nonhomogenous surface

Coating method for gas delivery system

Adapter plate for polishing and cleaning electrodes

Method of wet cleaning aluminum chamber parts

Corrosion resistant aluminum coating on plasma chamber components

Platen and adapter assemblies for facilitating silicon electrode po...

Bare aluminum baffles for resist stripping chambers

Coating method for gas delivery system

Extending lifetime of yttrium oxide as a plasma chamber material

Electrode carrier assemblies

Platen and adapter assemblies for facilitating silicon electrode po...

Method of cleaning aluminum plasma chamber parts

Electrode securing platens and electrode polishing assemblies incor...

Bare aluminum baffles for resist stripping chambers

Electrode transporter and fixture sets incorporating the same

Peripherally engaging electrode carriers and assemblies incorporati...

Cleaning of bonded silicon electrodes

Extending storage time of removed plasma chamber components prior t...

Backside mounted electrode carriers and assemblies incorporating th...

Extending lifetime of yttrium oxide as a plasma chamber material

Immersive oxidation and etching process for cleaning silicon electr...

Processes for reconditioning multi-component electrodes

Extending storage time of removed plasma chamber components prior t...

Bare aluminum baffles for resist stripping chambers

Cleaning fixtures and methods of cleaning electrode assembly plenums

Patents Applicationslast 30 patents

CONDITIONING CHAMBER COMPONENT

PLASMA PROCESSING CHAMBER WITH MULTILAYER PROTECTIVE SURFACE

CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM

METHOD AND APPARATUS FOR MEASURING PARTICLES

METHOD FOR CONDITIONING A CERAMIC COATING

CONDITIONING CHAMBER COMPONENT

METHOD TO SELECTIVELY PATTERN A SURFACE FOR PLASMA RESISTANT COAT A...

CONDITIONING CHAMBER COMPONENT

METHOD FOR TREATING A NONHOMOGENOUS SURFACE

ADAPTER PLATE FOR POLISHING AND CLEANING ELECTRODES

COATING METHOD FOR GAS DELIVERY SYSTEM

CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS

METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS

TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER...

PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...

METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS

BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS

EXTENDING LIFETIME OF YTTRIUM OXIDE AS A PLASMA CHAMBER MATERIAL

Electrode Securing Platens And Electrode Polishing Assemblies Incor...

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...

Electrode Carrier Assemblies

COATING METHOD FOR GAS DELIVERY SYSTEM

EXTENDING STORAGE TIME OF REMOVED PLASMA CHAMBER COMPONENTS PRIOR T...

METHODS FOR WET CLEANING QUARTZ SURFACES OF COMPONENTS FOR PLASMA P...

BARE ALUMINUM BAFFLES FOR RESIST STRIPPING CHAMBERS

IMMERSIVE OXIDATION AND ETCHING PROCESS FOR CLEANING SILICON ELECTR...

PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE PO...

PROCESSES FOR RECONDITIONING MULTI-COMPONENT ELECTRODES

PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATI...

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...