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Duck-Sun Yang
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Seoul, KR
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last 30 patents
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Patent Grant
Apparatus and method for detecting particles on an object
Patent number
7,245,365
Issue date
Jul 17, 2007
Samsung Electronics Co., Ltd.
Deok-Yong Kim
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method and system for measuring overlay of semiconductor device
Publication number
20070064232
Publication date
Mar 22, 2007
SAMSUNG ELECTRONICS CO., LTD.
Duck-Sun Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Specimen inspection apparatus and reference value setting unit and...
Publication number
20050111004
Publication date
May 26, 2005
Byoung-Chul Kim
G01 - MEASURING TESTING
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Patent Application
Apparatus and method for detecting particles on an object
Publication number
20040201841
Publication date
Oct 14, 2004
Deok-Yong Kim
G01 - MEASURING TESTING