Duk-Hyun Son

Person

Daejeon, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate storage apparatus and apparatus for processing substrate...
- Patent number 11,631,606
- Issue date Apr 18, 2023
- Semes Co., Ltd.
- Duk Hyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transporting substrate and system for treating substr...
- Patent number 11,569,103
- Issue date Jan 31, 2023
- Semes Co., Ltd.
- Sun Ho Ha
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate treatment apparatus
- Patent number 11,534,859
- Issue date Dec 27, 2022
- Semes Co., Ltd.
- Duk Hyun Son
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate supporting unit and single type substrate polishing appar...
- Patent number 8,113,918
- Issue date Feb 14, 2012
- Semes Co., Ltd.
- Gyo-Woog Koo
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
TRANSFER UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME
- Publication number 20240203776
- Publication date Jun 20, 2024
- SEMES CO., LTD.
- Duk Hyun SON
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20240203696
- Publication date Jun 20, 2024
- SEMES CO., LTD.
- Tae Sung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE, OPERATING METHOD THEREOF, AND SUBSTRATE...
- Publication number 20230411186
- Publication date Dec 21, 2023
- SEMES CO., LTD.
- Duk Hyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER FOR END EFFECTOR, TRANSPORTATION APPARATUS INCLUDING THE SA...
- Publication number 20230317434
- Publication date Oct 5, 2023
- SEMES CO., LTD.
- Jae Won SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA CONTROL METHOD USING MAGNETI...
- Publication number 20230317427
- Publication date Oct 5, 2023
- SEMES CO., LTD.
- Duk Hyun SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MODULE AND SEMICONDUCTOR MANUFACTURING EQUIPMENT
- Publication number 20230197492
- Publication date Jun 22, 2023
- SEMES CO., LTD.
- Duk Hyun SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE AND SYSTEM FOR TREATING SUBSTR...
- Publication number 20230130873
- Publication date Apr 27, 2023
- SEMES CO., LTD.
- Sun Ho Ha
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER ASSEMBLY AND APPARATUS FOR TREATING A SUBSTRATE WITH THE T...
- Publication number 20220415679
- Publication date Dec 29, 2022
- SEMES CO., LTD.
- SU BIN JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING CARRIER AND SUBSTRATE TREATING SYSTEM
- Publication number 20220367155
- Publication date Nov 17, 2022
- SEMES CO., LTD.
- MUN GI JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20220108868
- Publication date Apr 7, 2022
- SEMES CO., LTD.
- Duk Hyun SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE
- Publication number 20220093374
- Publication date Mar 24, 2022
- SEMES CO., LTD.
- Duk Hyun SON
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20210354236
- Publication date Nov 18, 2021
- SEMES CO., LTD.
- Duk Hyun Son
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE AND SYSTEM FOR TREATING SUBSTR...
- Publication number 20210217639
- Publication date Jul 15, 2021
- SEMES CO., LTD.
- Sun Ho Ha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING HEIGHT ADJUSTING DEVICE AND WAFER ETCHING APPARATUS INCL...
- Publication number 20200168442
- Publication date May 28, 2020
- Byung Kyu Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20200168496
- Publication date May 28, 2020
- Duk Hyun Son
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE STORAGE APPARATUS AND APPARATUS FOR PROCESSING SUBSTRATE...
- Publication number 20200105565
- Publication date Apr 2, 2020
- SEMES CO., LTD.
- Duk Hyun Son
- B08 - CLEANING
Information Patent Application
PLASMA GENERATING UNIT AND SUBSTRATE TREATING APPARATUS HAVING THE...
- Publication number 20160027617
- Publication date Jan 28, 2016
- SEMES CO., LTD.
- Duk Hyun SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING UNIT AND SINGLE TYPE SUBSTRATE POLISHING APPAR...
- Publication number 20090325469
- Publication date Dec 31, 2009
- SEMES CO., LTD.
- Gyo-Woog KOO
- B24 - GRINDING POLISHING

Duk-Hyun Son

Person

Patents Grantslast 30 patents

Substrate storage apparatus and apparatus for processing substrate...

Apparatus for transporting substrate and system for treating substr...

Substrate treatment apparatus

Substrate supporting unit and single type substrate polishing appar...

Patents Applicationslast 30 patents

TRANSFER UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

EQUIPMENT FRONT END MODULE, OPERATING METHOD THEREOF, AND SUBSTRATE...

CARRIER FOR END EFFECTOR, TRANSPORTATION APPARATUS INCLUDING THE SA...

PLASMA PROCESSING APPARATUS AND PLASMA CONTROL METHOD USING MAGNETI...

SUBSTRATE TRANSFER MODULE AND SEMICONDUCTOR MANUFACTURING EQUIPMENT

APPARATUS FOR TRANSPORTING SUBSTRATE AND SYSTEM FOR TREATING SUBSTR...

TRANSFER ASSEMBLY AND APPARATUS FOR TREATING A SUBSTRATE WITH THE T...

RING CARRIER AND SUBSTRATE TREATING SYSTEM

SUBSTRATE TREATING APPARATUS

APPARATUS FOR TREATING SUBSTRATE

SUBSTRATE TREATMENT APPARATUS

APPARATUS FOR TRANSPORTING SUBSTRATE AND SYSTEM FOR TREATING SUBSTR...

FOCUS RING HEIGHT ADJUSTING DEVICE AND WAFER ETCHING APPARATUS INCL...

SUBSTRATE TREATMENT APPARATUS

SUBSTRATE STORAGE APPARATUS AND APPARATUS FOR PROCESSING SUBSTRATE...

PLASMA GENERATING UNIT AND SUBSTRATE TREATING APPARATUS HAVING THE...

SUBSTRATE SUPPORTING UNIT AND SINGLE TYPE SUBSTRATE POLISHING APPAR...