Dukhyun Son

Person

Chungcheongnam-do, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Container and substrate treating apparatus
- Patent number 12,148,641
- Issue date Nov 19, 2024
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,087,560
- Issue date Sep 10, 2024
- Semes Co., Ltd.
- Dukhyun Son
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus and method for processing substrate
- Patent number 11,756,817
- Issue date Sep 12, 2023
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus and substrate treating apparatus
- Patent number 11,699,599
- Issue date Jul 11, 2023
- Semes Co., Ltd.
- Byung Kyu Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Buffer unit, and apparatus and method for treating substrate with t...
- Patent number 11,569,110
- Issue date Jan 31, 2023
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 11,295,936
- Issue date Apr 5, 2022
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Buffer unit, and apparatus for treating substrate with the unit
- Patent number 11,056,367
- Issue date Jul 6, 2021
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable capacitor, plasma impedance matching device, plasma impe...
- Patent number 9,715,996
- Issue date Jul 25, 2017
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230360893
- Publication date Nov 9, 2023
- SEMES CO., LTD.
- DUKHYUN SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER PLATE SET AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20230348207
- Publication date Nov 2, 2023
- SEMES CO., LTD.
- Dukhyun SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230317428
- Publication date Oct 5, 2023
- SEMES CO., LTD.
- Dukhyun SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230317436
- Publication date Oct 5, 2023
- SEMES CO., LTD.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER AND SUBSTRATE TREATING APPARATUS
- Publication number 20220044951
- Publication date Feb 10, 2022
- SEMES CO., LTD.
- DUKHYUN SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20210217594
- Publication date Jul 15, 2021
- SEMES CO., LTD.
- Dukhyun SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TREATING APPARATUS
- Publication number 20210118702
- Publication date Apr 22, 2021
- SEMES CO., LTD.
- Byung Kyu KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20200294830
- Publication date Sep 17, 2020
- SEMES CO., LTD.
- Dukhyun SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20200273681
- Publication date Aug 27, 2020
- SEMES CO., LTD.
- Dukhyun SON
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
BUFFER UNIT, AND APPARATUS AND METHOD FOR TREATING SUBSTRATE WITH T...
- Publication number 20200066561
- Publication date Feb 27, 2020
- SEMES CO., LTD.
- DUKHYUN SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BUFFER UNIT, AND APPARATUS AND METHOD FOR TREATING SUBSTRATE WITH T...
- Publication number 20200066562
- Publication date Feb 27, 2020
- SEMES CO., LTD.
- DUKHYUN SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND IMPEDANCE MATCHING METHOD
- Publication number 20130105082
- Publication date May 2, 2013
- SEMES CO., LTD.
- Harutyun MELIKYAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjustable Capacitor, Plasma Impedance Matching Device, Plasma Impe...
- Publication number 20120168081
- Publication date Jul 5, 2012
- SEMES CO., LTD.
- Dukhyun Son
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Dukhyun Son

Person

Patents Grantslast 30 patents

Container and substrate treating apparatus

Apparatus and method for treating substrate

Apparatus and method for processing substrate

Substrate transfer apparatus and substrate treating apparatus

Buffer unit, and apparatus and method for treating substrate with t...

Apparatus and method for treating substrate

Buffer unit, and apparatus for treating substrate with the unit

Adjustable capacitor, plasma impedance matching device, plasma impe...

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

TRANSFER PLATE SET AND SUBSTRATE TRANSFER APPARATUS

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

CONTAINER AND SUBSTRATE TREATING APPARATUS

APPARATUS AND METHOD FOR TREATING SUBSTRATE

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TREATING APPARATUS

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

APPARATUS AND METHOD FOR TREATING SUBSTRATE

BUFFER UNIT, AND APPARATUS AND METHOD FOR TREATING SUBSTRATE WITH T...

BUFFER UNIT, AND APPARATUS AND METHOD FOR TREATING SUBSTRATE WITH T...

SUBSTRATE PROCESSING DEVICE AND IMPEDANCE MATCHING METHOD

Adjustable Capacitor, Plasma Impedance Matching Device, Plasma Impe...