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Duncan Dobson
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Woodside, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Cluster tool systems and methods for in fab wafer processing
Patent number
6,852,012
Issue date
Feb 8, 2005
Wafer Solutions, Inc.
Krishna Vepa
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Substrate grinding systems and methods to reduce dot depth variation
Publication number
20020090799
Publication date
Jul 11, 2002
Krishna Vepa
B24 - GRINDING POLISHING
Information
Patent Application
Vacuum mount wafer polishing methods and apparatus
Publication number
20020086625
Publication date
Jul 4, 2002
Wafer Solutions, Inc.
Krishna Vepa
B24 - GRINDING POLISHING
Information
Patent Application
Systems and methods to significantly reduce the grinding marks in s...
Publication number
20020052169
Publication date
May 2, 2002
Krishna Vepa
B24 - GRINDING POLISHING
Information
Patent Application
Free Floating double side polishing of substrates
Publication number
20020052116
Publication date
May 2, 2002
Krishna Vepa
B24 - GRINDING POLISHING
Information
Patent Application
Cluster tool systems and methods to eliminate wafer waviness during...
Publication number
20020004358
Publication date
Jan 10, 2002
Krishna Vepa
B24 - GRINDING POLISHING
Information
Patent Application
Grind polish cluster and methods to remove visual grind pattern
Publication number
20020004265
Publication date
Jan 10, 2002
Krishna Vepa
B24 - GRINDING POLISHING
Information
Patent Application
Cluster tool systems and methods for in fab wafer processing
Publication number
20010027082
Publication date
Oct 4, 2001
Krishna Vepa
B24 - GRINDING POLISHING
Information
Patent Application
Cluster tool systems and methods for processing wafers
Publication number
20010024877
Publication date
Sep 27, 2001
Krishna Vepa
B24 - GRINDING POLISHING
Information
Patent Application
Grind and single wafer etch process to remove metallic contaminatio...
Publication number
20010023082
Publication date
Sep 20, 2001
Krishna Vepa
B24 - GRINDING POLISHING