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Duncan Harris
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Fairfield, CT, US
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Patents Grants
last 30 patents
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Patent Grant
Patterning device support and lithographic apparatus
Patent number
9,740,112
Issue date
Aug 22, 2017
ASML Holding N.V.
Arindam Sinharoy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Patterning Device Support and Lithographic Apparatus
Publication number
20150277240
Publication date
Oct 1, 2015
ASML Holding N.V.
Arindam Sinharoy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY