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Duy D. Nguyen
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Milpitas, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Feedforward temperature control for plasma processing apparatus
Patent number
10,854,425
Issue date
Dec 1, 2020
Applied Materials, Inc.
Chetan Mahadeswaraswamy
G05 - CONTROLLING REGULATING
Information
Patent Grant
Component temperature control by coolant flow control and heater du...
Patent number
9,639,097
Issue date
May 2, 2017
Applied Materials, Inc.
Chetan Mahadeswaraswamy
G05 - CONTROLLING REGULATING
Information
Patent Grant
Feedforward temperature control for plasma processing apparatus
Patent number
9,338,871
Issue date
May 10, 2016
Applied Materials, Inc.
Chetan Mahadeswaraswamy
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
9,214,315
Issue date
Dec 15, 2015
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Synchronized radio frequency pulsing for plasma etching
Patent number
8,962,488
Issue date
Feb 24, 2015
Applied Materials, Inc.
Bryan Liao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
8,916,793
Issue date
Dec 23, 2014
Applied Materials, Inc.
Fernando M. Silveira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Component temperature control by coolant flow control and heater du...
Patent number
8,880,227
Issue date
Nov 4, 2014
Applied Materials, Inc.
Chetan Mahadeswaraswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Synchronized radio frequency pulsing for plasma etching
Patent number
8,404,598
Issue date
Mar 26, 2013
Applied Materials, Inc.
Bryan Liao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of controlling process parameters for semiconductor manufact...
Patent number
7,848,840
Issue date
Dec 7, 2010
Applied Materials, Inc.
Ritchie Dao
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20160155612
Publication date
Jun 2, 2016
Chetan MAHADESWARASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20150316941
Publication date
Nov 5, 2015
Applied Materials, Inc.
Fernando M. SILVEIRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPONENT TEMPERATURE CONTROL BY COOLANT FLOW CONTROL AND HEATER DU...
Publication number
20150134128
Publication date
May 14, 2015
Applied Materials, Inc.
Chetan MAHADESWARASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATED ALGORITHM FOR TUNING OF FEEDFORWARD CONTROL PARAMETERS IN...
Publication number
20140224767
Publication date
Aug 14, 2014
Walter R. MERRY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYNCHRONIZED RADIO FREQUENCY PULSING FOR PLASMA ETCHING
Publication number
20130213935
Publication date
Aug 22, 2013
Applied Materials, Inc.
BRYAN LIAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20120132397
Publication date
May 31, 2012
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
COMPONENT TEMPERATURE CONTROL BY COOLANT FLOW CONTROL AND HEATER DU...
Publication number
20120048467
Publication date
Mar 1, 2012
Applied Materials, Inc.
Chetan Mahadeswaraswamy
G05 - CONTROLLING REGULATING
Information
Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20110186545
Publication date
Aug 4, 2011
Applied Materials, Inc.
Chetan MAHADESWARASWAMY
G05 - CONTROLLING REGULATING
Information
Patent Application
SYNCHRONIZED RADIO FREQUENCY PULSING FOR PLASMA ETCHING
Publication number
20110031216
Publication date
Feb 10, 2011
Applied Materials, Inc.
BRYAN LIAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF CONTROLLING PROCESS PARAMETERS FOR SEMICONDUCTOR MANUFACT...
Publication number
20090177310
Publication date
Jul 9, 2009
Ritchie Dao
G05 - CONTROLLING REGULATING