Duygu AKBULUT

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology apparatus
- Patent number 11,940,739
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Nitesh Pandey
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for determining the position of a target stru...
- Patent number 11,927,891
- Issue date Mar 12, 2024
- ASML Netherlands B.V.
- Nitesh Pandey
- G01 - MEASURING TESTING
Information Patent Grant
Position sensor
- Patent number 11,333,985
- Issue date May 17, 2022
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology apparatus
- Patent number 11,262,661
- Issue date Mar 1, 2022
- ASML Netherlands B.V.
- Nitesh Pandey
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for deriving corrections, method and apparatus...
- Patent number 11,243,470
- Issue date Feb 8, 2022
- ASML Netherlands B.V.
- Nitish Kumar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology sensor, lithographic apparatus and method for manufacturi...
- Patent number 11,086,240
- Issue date Aug 10, 2021
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement apparatus and method of measuring a target
- Patent number 11,042,100
- Issue date Jun 22, 2021
- ASML Netherlands B.V.
- Jin Lian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology apparatus, lithographic system, and method of measuring a...
- Patent number 10,908,514
- Issue date Feb 2, 2021
- ASML Netherlands B.V.
- Janneke Ravensbergen
- G01 - MEASURING TESTING
Information Patent Grant
Metrology sensor, lithographic apparatus and method for manufacturi...
- Patent number 10,788,766
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G01 - MEASURING TESTING
Information Patent Grant
Position sensor, lithographic apparatus and method for manufacturin...
- Patent number 10,527,959
- Issue date Jan 7, 2020
- ASML Netherlands B.V.
- Simon Reinald Huisman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology apparatus, lithographic system, and method of measuring a...
- Patent number 10,444,640
- Issue date Oct 15, 2019
- ASML Netherlands B.V.
- Janneke Ravensbergen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position sensing arrangement and lithographic apparatus including s...
- Patent number 10,317,808
- Issue date Jun 11, 2019
- ASML Netherlands B.V.
- Simon Reinald Huisman
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for processing a radiation beam with coherence
- Patent number 10,234,767
- Issue date Mar 19, 2019
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G02 - OPTICS
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 10,185,224
- Issue date Jan 22, 2019
- ASML Netherlands B.V.
- Ferry Zijp
- G02 - OPTICS
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 10,126,659
- Issue date Nov 13, 2018
- ASML Netherlands B.V.
- Ferry Zijp
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 9,927,722
- Issue date Mar 27, 2018
- ASML Netherlands B.V.
- Koos Van Berkel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 9,811,001
- Issue date Nov 7, 2017
- ASML Netherlands B.V.
- Peter Danny Van Voorst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Metrology Apparatus
- Publication number 20240184218
- Publication date Jun 6, 2024
- ASML NETHERLANDS B.V.
- Nitesh PANDEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY APPARATUS
- Publication number 20220121127
- Publication date Apr 21, 2022
- ASML NETHERLANDS B.V.
- Nitesh PANDEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and Methods for Determining the Position of a Target Stru...
- Publication number 20210364936
- Publication date Nov 25, 2021
- ASML NETHERLANDS B.V.
- Nitesh PANDEY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION SENSOR
- Publication number 20210124276
- Publication date Apr 29, 2021
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus Goorden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Sensor, Lithographic Apparatus and Method for Manufacturi...
- Publication number 20200103772
- Publication date Apr 2, 2020
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURI...
- Publication number 20200089135
- Publication date Mar 19, 2020
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM, AND METHOD OF MEASURING A...
- Publication number 20200004165
- Publication date Jan 2, 2020
- ASML NETHERLANDS B.V.
- Janneke RAVENSBERGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Apparatus
- Publication number 20190384184
- Publication date Dec 19, 2019
- ASML NETHERLANDS B.V.
- Nitesh Pandey
- G01 - MEASURING TESTING
Information Patent Application
Measurement Apparatus and Method of Measuring a Target
- Publication number 20190369505
- Publication date Dec 5, 2019
- ASML NETHERLANDS B.V.
- Jin LIAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURIN...
- Publication number 20190212658
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Simon Reinald HUISMAN
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR DERIVING CORRECTIONS, METHOD AND APPARATUS...
- Publication number 20190212660
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Nitish KUMAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM, AND METHOD OF MEASURING A...
- Publication number 20190113852
- Publication date Apr 18, 2019
- ASML NETHERLANDS B.V.
- Janneke RAVENSBERGEN
- G01 - MEASURING TESTING
Information Patent Application
POSITION SENSING ARRANGEMENT AND LITHOGRAPHIC APPARATUS INCLUDING S...
- Publication number 20190049866
- Publication date Feb 14, 2019
- ASML NETHERLANDS B.V.
- Simon Reinald HUISMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20180120714
- Publication date May 3, 2018
- ASML NETHERLANDS B.V.
- Ferry Zijp
- G02 - OPTICS
Information Patent Application
Device and Method for Processing a Radiation Beam with Coherence
- Publication number 20180031977
- Publication date Feb 1, 2018
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20170102620
- Publication date Apr 13, 2017
- ASML NETHERLANDS B.V.
- Ferry ZIJP
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20160266503
- Publication date Sep 15, 2016
- ASML NETHERLANDS B.V.
- Peter Danny Van Voorst
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20160246189
- Publication date Aug 25, 2016
- ASML NETHERLANDS B.V.
- Koos VAN BERKEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Duygu AKBULUT

Person

Patents Grantslast 30 patents

Metrology apparatus

Apparatus and methods for determining the position of a target stru...

Position sensor

Metrology apparatus

Method and apparatus for deriving corrections, method and apparatus...

Metrology sensor, lithographic apparatus and method for manufacturi...

Measurement apparatus and method of measuring a target

Metrology apparatus, lithographic system, and method of measuring a...

Metrology sensor, lithographic apparatus and method for manufacturi...

Position sensor, lithographic apparatus and method for manufacturin...

Metrology apparatus, lithographic system, and method of measuring a...

Position sensing arrangement and lithographic apparatus including s...

Device and method for processing a radiation beam with coherence

Method and apparatus for inspection and metrology

Method and apparatus for inspection and metrology

Method and apparatus for inspection and metrology

Method and apparatus for inspection and metrology

Patents Applicationslast 30 patents

Metrology Apparatus

METROLOGY APPARATUS

Apparatus and Methods for Determining the Position of a Target Stru...

POSITION SENSOR

Metrology Sensor, Lithographic Apparatus and Method for Manufacturi...

METROLOGY SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURI...

METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM, AND METHOD OF MEASURING A...

Metrology Apparatus

Measurement Apparatus and Method of Measuring a Target

POSITION SENSOR, LITHOGRAPHIC APPARATUS AND METHOD FOR MANUFACTURIN...

METHOD AND APPARATUS FOR DERIVING CORRECTIONS, METHOD AND APPARATUS...

METROLOGY APPARATUS, LITHOGRAPHIC SYSTEM, AND METHOD OF MEASURING A...

POSITION SENSING ARRANGEMENT AND LITHOGRAPHIC APPARATUS INCLUDING S...

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

Device and Method for Processing a Radiation Beam with Coherence

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY