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last 30 patents
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Patent Grant
Method to reduce residual particulate contamination in CVD and PVD...
Patent number
6,812,156
Issue date
Nov 2, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Dyson Day
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method to reduce residual particulate contamination in CVD and PVD...
Publication number
20040005787
Publication date
Jan 8, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Dyson Day
H01 - BASIC ELECTRIC ELEMENTS