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Dzmitry Labetski
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Utrecht, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for and method of reducing contamination from source mate...
Patent number
11,874,608
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Yue Ma
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Guiding device and associated system
Patent number
11,822,252
Issue date
Nov 21, 2023
ASML Netherlands B.V.
Dzmitry Labetski
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Guiding device and associated system
Patent number
10,955,749
Issue date
Mar 23, 2021
ASML Netherlands B.V.
Dzmitry Labetski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source and lithographic apparatus
Patent number
10,394,141
Issue date
Aug 27, 2019
ASML Netherlands B.V.
Michel Riepen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source, lithographic apparatus device manufacturing metho...
Patent number
10,222,701
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Chuangxin Zhao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source and lithographic apparatus
Patent number
9,753,383
Issue date
Sep 5, 2017
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Droplet generator, EUV radiation source, lithographic apparatus, me...
Patent number
9,715,174
Issue date
Jul 25, 2017
ASML Netherlands B.V.
Johan Frederik Dijksman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fuel stream generator, source collector apparatus and lithographic...
Patent number
9,671,698
Issue date
Jun 6, 2017
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Module and method for producing extreme ultraviolet radiation
Patent number
9,363,879
Issue date
Jun 7, 2016
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source and lithographic apparatus
Patent number
9,310,689
Issue date
Apr 12, 2016
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source
Patent number
9,113,539
Issue date
Aug 18, 2015
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Source collector, lithographic apparatus and device manufacturing m...
Patent number
9,091,944
Issue date
Jul 28, 2015
ASML Netherlands B.V.
Erik Roelof Loopstra
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Information
Patent Grant
Collector mirror assembly and method for producing extreme ultravio...
Patent number
9,013,679
Issue date
Apr 21, 2015
ASML Netherlands B.V.
Dzmitry Labetski
G02 - OPTICS
Information
Patent Grant
Module and method for producing extreme ultraviolet radiation
Patent number
8,901,521
Issue date
Dec 2, 2014
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source and lithographic apparatus
Patent number
8,755,032
Issue date
Jun 17, 2014
ASML Netherlands B.V.
Andrei Mikhailovich Yakunin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,749,756
Issue date
Jun 10, 2014
ASML Netherlands B.V.
Yuri Johannes Gabrial Van De Vijver
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and system for determining a suppression factor of a suppres...
Patent number
8,711,325
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Source module, radiation source and lithographic apparatus
Patent number
8,405,055
Issue date
Mar 26, 2013
ASML Netherlands B.V.
Dzmitry Labetski
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source, lithographic apparatus, and device manufacturing...
Patent number
8,368,032
Issue date
Feb 5, 2013
ASML Netherlands B.V.
Dzmitry Labetski
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Gas gauge, lithographic apparatus and device manufacturing method
Patent number
8,220,315
Issue date
Jul 17, 2012
ASML Netherlands B.V.
Dzmitry Labetski
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,115,900
Issue date
Feb 14, 2012
ASML Netherlands B.V.
Yuri Johannes Gabriël Van De Vijver
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR AND METHOD OF REDUCING CONTAMINATION FROM SOURCE MATE...
Publication number
20240103387
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
Publication number
20240085796
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Dzmitry LABETSKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS FOR AND METHOD OF REDUCING CONTAMINATION FROM SOURCE MATE...
Publication number
20210325791
Publication date
Oct 21, 2021
ASML NETHERLANDS B.V.
Yue Ma
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
Publication number
20210141311
Publication date
May 13, 2021
ASML NETHERLANDS B.V.
Dzmitry LABETSKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
Publication number
20200089124
Publication date
Mar 19, 2020
ASML NETHERLANDS B.V.
Dzmitry LABETSKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation Source and Lithographic Apparatus
Publication number
20170322499
Publication date
Nov 9, 2017
ASML NETHERLANDS B.V.
Michel RIEPEN
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHO...
Publication number
20160209753
Publication date
Jul 21, 2016
ASML NETHERLANDS B.V.
Chuangxin ZHAO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DROPLET GENERATOR, EUV RADIATION SOURCE, LITHOGRAPHIC APPARATUS, ME...
Publication number
20150293456
Publication date
Oct 15, 2015
ASML NETHERLANDS B.V.
Johan Frederik Dijksman
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
Publication number
20150077729
Publication date
Mar 19, 2015
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf VAN EMPEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Fuel Stream Generator, Source Collector Apparatus and Lithographic...
Publication number
20150029478
Publication date
Jan 29, 2015
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
Publication number
20150002830
Publication date
Jan 1, 2015
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
COLLECTOR MIRROR ASSEMBLY AND METHOD FOR PRODUCING EXTREME ULTRAVIO...
Publication number
20130088697
Publication date
Apr 11, 2013
ASML NETHERLANDS B.V.
Dzmitry Labetski
G02 - OPTICS
Information
Patent Application
Radiation Source
Publication number
20130077070
Publication date
Mar 28, 2013
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus SCHIMMEL
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation Source, Lithographic Apparatus and Device Manufacturing M...
Publication number
20120327381
Publication date
Dec 27, 2012
ASML NETHERLANDS B.V.
Dzmitry Labetski
G02 - OPTICS
Information
Patent Application
SOURCE COLLECTOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
Publication number
20120182536
Publication date
Jul 19, 2012
ASML NETHERLANDS B.V.
Erik Roelof Loopstra
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120147348
Publication date
Jun 14, 2012
ASML NETHERLANDS B.V.
Yuri Johannes Gabriel VAN DE VIJVER
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING A SUPPRESSION FACTOR OF A SUPPRES...
Publication number
20110261329
Publication date
Oct 27, 2011
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
Publication number
20110164236
Publication date
Jul 7, 2011
ASML Netherlands B.V.
Andrei Mikhailovich Yakunin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
RADIATION SYSTEM AND METHOD, AND A SPECTRAL PURITY FILTER
Publication number
20110024651
Publication date
Feb 3, 2011
ASML NETHERLANDS B.V.
Hendrikus Gijsbertus Schimmel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING...
Publication number
20100231130
Publication date
Sep 16, 2010
ASML NETHERLANDS B.V.
Dzmitry LABETSKI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Gas Gauge, Lithographic Apparatus and Device Manufacturing Method
Publication number
20100116029
Publication date
May 13, 2010
ASML NETHERLANDS B.V.
Dzmitry Labetski
G01 - MEASURING TESTING
Information
Patent Application
SOURCE MODULE, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
Publication number
20100085547
Publication date
Apr 8, 2010
ASML NETHERLANDS B.V.
Dzmitry Labetski
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
Publication number
20090090877
Publication date
Apr 9, 2009
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090073396
Publication date
Mar 19, 2009
ASML NETHERLANDS B.V.
Yuri Johannes Gabriel Van De Vijver
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR