Dzmitry Sanko

Person

Vallejo, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for determining quality of semiconductor measur...
- Patent number 11,530,913
- Issue date Dec 20, 2022
- KLA Corporation
- Dzmitry Sanko
- G01 - MEASURING TESTING
Information Patent Grant
Measurement recipe optimization based on probabilistic domain knowl...
- Patent number 11,520,321
- Issue date Dec 6, 2022
- KLA Corporation
- Stilian Ivanov Pandev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metrology systems and methods for process control
- Patent number 10,490,462
- Issue date Nov 26, 2019
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Model based measurement systems with improved electromagnetic solve...
- Patent number 10,345,095
- Issue date Jul 9, 2019
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and computer program product for calibration of metr...
- Patent number 10,295,342
- Issue date May 21, 2019
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G01 - MEASURING TESTING
Information Patent Grant
Process-sensitive metrology systems and methods
- Patent number 10,216,096
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Myungjun Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology of multiple patterning processes
- Patent number 10,215,559
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G01 - MEASURING TESTING
Information Patent Grant
Signal response metrology for image based and scatterometry overlay...
- Patent number 10,210,606
- Issue date Feb 19, 2019
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Methods And Systems For Determining Quality Of Semiconductor Measur...
- Publication number 20220090912
- Publication date Mar 24, 2022
- KLA Corporation
- Dzmitry Sanko
- G01 - MEASURING TESTING
Information Patent Application
Measurement Recipe Optimization Based On Probabilistic Domain Knowl...
- Publication number 20210165398
- Publication date Jun 3, 2021
- KLA Corporation
- Stilian Ivanov Pandev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Metrology Systems And Methods For Process Control
- Publication number 20180108578
- Publication date Apr 19, 2018
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATION OF METR...
- Publication number 20170045356
- Publication date Feb 16, 2017
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G01 - MEASURING TESTING
Information Patent Application
Signal Response Metrology For Image Based And Scatterometry Overlay...
- Publication number 20160117847
- Publication date Apr 28, 2016
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Metrology Of Multiple Patterning Processes
- Publication number 20160109230
- Publication date Apr 21, 2016
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G01 - MEASURING TESTING

Dzmitry Sanko

Person

Patents Grantslast 30 patents

Methods and systems for determining quality of semiconductor measur...

Measurement recipe optimization based on probabilistic domain knowl...

Metrology systems and methods for process control

Model based measurement systems with improved electromagnetic solve...

System, method and computer program product for calibration of metr...

Process-sensitive metrology systems and methods

Metrology of multiple patterning processes

Signal response metrology for image based and scatterometry overlay...

Patents Applicationslast 30 patents

Methods And Systems For Determining Quality Of Semiconductor Measur...

Measurement Recipe Optimization Based On Probabilistic Domain Knowl...

Metrology Systems And Methods For Process Control

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATION OF METR...

Signal Response Metrology For Image Based And Scatterometry Overlay...

Metrology Of Multiple Patterning Processes