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Earl Jensen
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Encapsulated instrumented substrate apparatus for acquiring measure...
Patent number
11,823,925
Issue date
Nov 21, 2023
KLA Corporation
Mei Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Instrumented substrate apparatus
Patent number
11,668,601
Issue date
Jun 6, 2023
KLA Corporation
Robert D. Tas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ temperature sensing substrate, system, and method
Patent number
10,900,843
Issue date
Jan 26, 2021
KLA Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Grant
Process condition sensing device and method for plasma chamber
Patent number
10,777,393
Issue date
Sep 15, 2020
KLA-Tencor Corporation
Earl Jensen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Encapsulated instrumented substrate apparatus for acquiring measure...
Patent number
10,460,966
Issue date
Oct 29, 2019
KLA-Tencor Corporation
Mei Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for measuring radiation and temperature exposure...
Patent number
10,215,626
Issue date
Feb 26, 2019
KLA-Tencor Corporation
Mei Sun
G01 - MEASURING TESTING
Information
Patent Grant
Wafer level spectrometer
Patent number
9,964,440
Issue date
May 8, 2018
KLA-Tencor Corporation
Earl M. Jensen
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for measuring radiation and temperature exposure...
Patent number
9,823,121
Issue date
Nov 21, 2017
KLA-Tencor Corporation
Mei Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for measuring heat flux
Patent number
9,719,867
Issue date
Aug 1, 2017
KLA-Tencor Corporation
Stephen Sharratt
G01 - MEASURING TESTING
Information
Patent Grant
Position sensitive substrate device
Patent number
9,620,400
Issue date
Apr 11, 2017
KLA-Tencor Corporation
Earl Jensen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film thickness monitor
Patent number
9,360,302
Issue date
Jun 7, 2016
KLA-Tencor Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Grant
Automated interface apparatus and method for use in semiconductor w...
Patent number
9,356,822
Issue date
May 31, 2016
KLA-Tencor Corporation
Earl Jensen
G05 - CONTROLLING REGULATING
Information
Patent Grant
Thickness change monitor wafer for in situ film thickness monitoring
Patent number
9,305,753
Issue date
Apr 5, 2016
KLA-Tencor Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Grant
High temperature sensor wafer for in-situ measurements in active pl...
Patent number
9,222,842
Issue date
Dec 29, 2015
KLA-Tencor Corporation
Mei Sun
G01 - MEASURING TESTING
Information
Patent Grant
Wafer level spectrometer
Patent number
9,140,604
Issue date
Sep 22, 2015
KLA-Tencor Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Grant
Process condition measuring device (PCMD) and method for measuring...
Patent number
9,134,186
Issue date
Sep 15, 2015
KLA-Tencor Corporation
Mei Sun
G01 - MEASURING TESTING
Information
Patent Grant
Process condition sensing device and method for plasma chamber
Patent number
8,889,021
Issue date
Nov 18, 2014
KLA-Tencor Corporation
Earl Jensen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated process condition sensing wafer and data analysis system
Patent number
7,855,549
Issue date
Dec 21, 2010
KLA-Tencor Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process condition measuring device with shielding
Patent number
7,555,948
Issue date
Jul 7, 2009
Lynn Karl Wiese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process condition measuring device with shielding
Patent number
7,540,188
Issue date
Jun 2, 2009
Lynn Karl Wiese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated process condition sensing wafer and data analysis system
Patent number
7,151,366
Issue date
Dec 19, 2006
SensArray Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated process condition sensing wafer and data analysis system
Patent number
7,149,643
Issue date
Dec 12, 2006
SensArray Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated process condition sensing wafer and data analysis system
Patent number
7,135,852
Issue date
Nov 14, 2006
SensArray Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In situ technique for monitoring and controlling a process of chemi...
Patent number
6,010,538
Issue date
Jan 4, 2000
Luxtron Corporation
Mei H. Sun
G05 - CONTROLLING REGULATING
Information
Patent Grant
Electro optical board assembly for measuring the temperature of an...
Patent number
5,897,610
Issue date
Apr 27, 1999
Luxtron Corporation
Earl M. Jensen
G01 - MEASURING TESTING
Information
Patent Grant
Electro-optical board assembly for measuring the temperature of an...
Patent number
5,717,608
Issue date
Feb 10, 1998
Luxtron Corporation
Earl M. Jensen
G01 - MEASURING TESTING
Information
Patent Grant
Temperature measuring system having improved signal processing and...
Patent number
5,600,147
Issue date
Feb 4, 1997
Luxtron Corporation
Earl M. Jensen
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for measuring temperatures at a plurality of l...
Patent number
5,470,155
Issue date
Nov 28, 1995
Luxtron Corporation
Earl M. Jensen
G01 - MEASURING TESTING
Information
Patent Grant
Modular luminescence-based measuring system using fast digital sign...
Patent number
5,351,268
Issue date
Sep 27, 1994
Luxtron Corporation
Earl M. Jensen
G01 - MEASURING TESTING
Information
Patent Grant
Modular luminescence-based measuring system using fast digital sign...
Patent number
5,107,445
Issue date
Apr 21, 1992
Luxtron Corporation
Earl M. Jensen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
SENSOR CONFIGURATION FOR PROCESS CONDITION MEASURING DEVICES
Publication number
20220189803
Publication date
Jun 16, 2022
Farhat A. Quli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSTRUMENTED SUBSTRATE APPARATUS
Publication number
20210262859
Publication date
Aug 26, 2021
KLA Corporation
Robert D. Tas
G01 - MEASURING TESTING
Information
Patent Application
Encapsulated Instrumented Substrate Apparatus for Acquiring Measure...
Publication number
20200203200
Publication date
Jun 25, 2020
KLA-Tencor Corporation
Mei Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In-Situ Temperature Sensing Substrate, System, and Method
Publication number
20190368944
Publication date
Dec 5, 2019
KLA-Tencor Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Application
PROCESS CONDITION SENSING DEVICE AND METHOD FOR PLASMA CHAMBER
Publication number
20180114681
Publication date
Apr 26, 2018
KLA-Tencor Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Application
Method and System for Measuring Radiation and Temperature Exposure...
Publication number
20180052045
Publication date
Feb 22, 2018
KLA-Tencor Corporation
Mei Sun
G01 - MEASURING TESTING
Information
Patent Application
Encapsulated Instrumented Substrate Apparatus for Acquiring Measure...
Publication number
20170365495
Publication date
Dec 21, 2017
KLA-Tencor Corporation
Mei Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Measuring Radiation and Temperature Exposure...
Publication number
20160138969
Publication date
May 19, 2016
KLA-Tencor Corporation
Mei Sun
G01 - MEASURING TESTING
Information
Patent Application
WAFER LEVEL SPECTROMETER
Publication number
20160011046
Publication date
Jan 14, 2016
KLA Tencor
Earl M. Jensen
G01 - MEASURING TESTING
Information
Patent Application
POSITION SENSITIVE SUBSTRATE DEVICE
Publication number
20150176980
Publication date
Jun 25, 2015
KLA-Tencor Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Application
PROCESS CONDITION SENSING DEVICE AND METHOD FOR PLASMA CHAMBER
Publication number
20150020972
Publication date
Jan 22, 2015
KLA-Tencor Corporation
Earl Jensen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Measuring Heat Flux
Publication number
20140355643
Publication date
Dec 4, 2014
KLA-Tencor Corporation
Stephen Sharratt
G01 - MEASURING TESTING
Information
Patent Application
THICKNESS CHANGE MONITOR WAFER FOR IN SITU FILM THICKNESS MONITORING
Publication number
20140253928
Publication date
Sep 11, 2014
KLA-Tencor Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Application
HIGH TEMPERATURE SENSOR WAFER FOR IN-SITU MEASUREMENTS IN ACTIVE PL...
Publication number
20140192840
Publication date
Jul 10, 2014
KLA-Tencor Corporation
Mei Sun
G01 - MEASURING TESTING
Information
Patent Application
AUTOMATED INTERFACE APPARATUS AND METHOD FOR USE IN SEMICONDUCTOR W...
Publication number
20140122654
Publication date
May 1, 2014
KLA-Tencor Corporation
Earl Jensen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
FILM THICKNESS MONITOR
Publication number
20130155390
Publication date
Jun 20, 2013
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Application
WAFER LEVEL SPECTROMETER
Publication number
20120318966
Publication date
Dec 20, 2012
KLA-Tencor Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Application
PROCESS CONDITION MEASURING DEVICE (PCMD) AND METHOD FOR MEASURING...
Publication number
20120203495
Publication date
Aug 9, 2012
KLA-Tencor Corporation
Mei Sun
G01 - MEASURING TESTING
Information
Patent Application
PROCESS CONDITION SENSING DEVICE AND METHOD FOR PLASMA CHAMBER
Publication number
20110174777
Publication date
Jul 21, 2011
KLA-Tencor Corporation
Earl Jensen
G01 - MEASURING TESTING
Information
Patent Application
NON-CONTACT INTERFACE SYSTEM
Publication number
20110074341
Publication date
Mar 31, 2011
KLA-Tencor Corporation
Earl Jensen
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Process Condition Measuring Device with Shielding
Publication number
20070251338
Publication date
Nov 1, 2007
SensArray Corporation
Lynn Karl Wiese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process Condition Measuring Device with Shielding
Publication number
20070251339
Publication date
Nov 1, 2007
SensArray Corporation
Lynn Karl Wiese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated Process Condition Sensing Wafer and Data Analysis System
Publication number
20070046284
Publication date
Mar 1, 2007
SensArray Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated process condition sensing wafer and data analysis system
Publication number
20050246127
Publication date
Nov 3, 2005
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated process condition sensing wafer and data analysis system
Publication number
20040225462
Publication date
Nov 11, 2004
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated process condition sensing wafer and data analysis system
Publication number
20040154417
Publication date
Aug 12, 2004
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS