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Earl William EBERT
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Oxford, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Patterning device support, lithographic apparatus, and method of co...
Patent number
9,977,351
Issue date
May 22, 2018
ASML Holding N.V.
Earl William Ebert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measuring method, measurement apparatus, lithographic apparatus and...
Patent number
9,891,540
Issue date
Feb 13, 2018
ASML Holding N.V.
Earl William Ebert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning device support, lithographic apparatus, and method of co...
Patent number
9,766,557
Issue date
Sep 19, 2017
ASML Holding N.V.
Earl William Ebert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle cooling system in a lithographic apparatus
Patent number
9,632,434
Issue date
Apr 25, 2017
ASML Holding N.V.
Earl William Ebert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning device support, lithographic apparatus, and method of co...
Patent number
9,632,433
Issue date
Apr 25, 2017
ASML Holding N.V.
Earl William Ebert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Tunable wavelength illumination system
Patent number
8,730,476
Issue date
May 20, 2014
ASML Holding N.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Tunable wavelength illumination system
Patent number
8,508,736
Issue date
Aug 13, 2013
ASML Holding N.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Fluid gauge proximity sensor and method of operating same using a m...
Patent number
RE42650
Issue date
Aug 30, 2011
ASML Holding N.V.
Daniel N. Galburt
073 - Measuring and testing
Information
Patent Grant
Fluid gauge proximity sensor and method of operating same using a m...
Patent number
7,134,321
Issue date
Nov 14, 2006
ASML Holding N.V.
Daniel N. Galburt
G01 - MEASURING TESTING
Information
Patent Grant
Gas gauge proximity sensor with a modulated gas flow
Patent number
7,021,121
Issue date
Apr 4, 2006
ASML Holding N.V.
Earl W. Ebert
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
CHARGE DISSIPATIVE RETICLE TABLE CLEANING RETICLE
Publication number
20240045346
Publication date
Feb 8, 2024
ASML NETHERLANDS B.V.
Pedro Julian RIZO DIAGO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEM, AND INTENSITY IMBALANCE M...
Publication number
20230324817
Publication date
Oct 12, 2023
ASML Holding N.V.
Earl William EBERT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
Publication number
20170307986
Publication date
Oct 26, 2017
ASML Holding N.V.
Earl William EBERT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASURING METHOD, MEASUREMENT APPARATUS, LITHOGRAPHIC APPARATUS AND...
Publication number
20170235230
Publication date
Aug 17, 2017
ASML Holding N.V.
Earl William EBERT
G01 - MEASURING TESTING
Information
Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
Publication number
20170160652
Publication date
Jun 8, 2017
ASML Holding N.V.
Earl William EBERT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
Publication number
20150301456
Publication date
Oct 22, 2015
ASML Holding N.V.
Earl William EBERT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reticle Cooling System In A Lithographic Apparatus
Publication number
20150241796
Publication date
Aug 27, 2015
ASML Holding N.V.
Earl William EBERT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reticle Heater to Keep Reticle Heating Uniform
Publication number
20150212432
Publication date
Jul 30, 2015
ASML NETHERLANDS B.V.
Johannes Onvlee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Heating and Cooling Systems in a Lithographic Apparatus
Publication number
20150192856
Publication date
Jul 9, 2015
ASML NETHERLANDS B.V.
Johannes Onvlee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TUNABLE WAVELENGTH ILLUMINATION SYSTEM
Publication number
20140253891
Publication date
Sep 11, 2014
ASML Holding N.V.
Arie Jeffrey DEN BOEF
G02 - OPTICS
Information
Patent Application
Tunable Wavelength Illumination System
Publication number
20130258316
Publication date
Oct 3, 2013
ASML Holding N.V.
Arie Jeffrey DEN BOEF
G02 - OPTICS
Information
Patent Application
Fluid gauge proximity sensor and method of operating same using a m...
Publication number
20060016247
Publication date
Jan 26, 2006
ASML Holding N.V.
Daniel N. Galburt
G01 - MEASURING TESTING
Information
Patent Application
Gas gauge proximity sensor with a modulated gas flow
Publication number
20050274173
Publication date
Dec 15, 2005
ASML Holding N.V.
Earl W. Ebert
G01 - MEASURING TESTING