Eberhard Muhlfriedel

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Maulbronn, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device for coating substrates in semiconductor production
- Patent number 5,650,196
- Issue date Jul 22, 1997
- Steag MicroTech GmbH
- Eberhard Muhlfriedel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...