Eckart Bergmann

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for exposing a layout comprising multiple layers on a wafer
- Patent number 6,635,395
- Issue date Oct 21, 2003
- Leica Microsystems Lithography GmbH
- Peter Hahmann
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for exposing a layout comprising multiple layers on a wafer
- Publication number 20020039828
- Publication date Apr 4, 2002
- LEICA MICROSYSTEMS LITHOGRAPHY GmbH
- Peter Hahmann
- B82 - NANO-TECHNOLOGY