Eckhard Graf

Person

Gomaringen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Micromechanical device and method for manufacturing a micromechanic...
- Patent number 11,261,082
- Issue date Mar 1, 2022
- Robert Bosch GmbH
- Eckhard Graf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS component having two different internal pressures
- Patent number 10,752,498
- Issue date Aug 25, 2020
- Robert Bosch GmbH
- Achim Breitling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component having a via and method for manufacturing it
- Patent number 8,975,118
- Issue date Mar 10, 2015
- Robert Bosch GmbH
- Julian Gonska
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor module
- Patent number 8,748,998
- Issue date Jun 10, 2014
- Robert Bosch GmbH
- Jens Frey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for filling cavities in wafers, correspondingly filled blind...
- Patent number 8,647,961
- Issue date Feb 11, 2014
- Robert Bosch GmbH
- Jens Frey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for establishing and closing a trench of a semiconductor com...
- Patent number 8,587,095
- Issue date Nov 19, 2013
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical component having a trench st...
- Patent number 8,564,078
- Issue date Oct 22, 2013
- Robert Bosch GmbH
- Roland Scheuerer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical component having a filler la...
- Patent number 8,419,957
- Issue date Apr 16, 2013
- Robert Bosch GmbH
- Roland Scheuerer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component having multiple caverns, and manufacturin...
- Patent number 8,174,082
- Issue date May 8, 2012
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical component having a trench st...
- Patent number 8,138,006
- Issue date Mar 20, 2012
- Robert Bosch GmbH
- Roland Scheuerer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical cap structure and a corresponding production method
- Patent number 7,294,894
- Issue date Nov 13, 2007
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component as well as a method for producing a micro...
- Patent number 7,153,718
- Issue date Dec 26, 2006
- Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for joining a silicon plate to a second plate
- Patent number 6,955,975
- Issue date Oct 18, 2005
- Robert Bosch GmbH
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical component and a componen...
- Patent number 6,951,824
- Issue date Oct 4, 2005
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component as well as a method for producing a micro...
- Patent number 6,876,048
- Issue date Apr 5, 2005
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component
- Patent number 6,465,854
- Issue date Oct 15, 2002
- Robert Bosch GmbH
- Horst Muenzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for sectioning a substrate wafer into a plurality of substra...
- Patent number 6,406,979
- Issue date Jun 18, 2002
- Robert Bosch GmbH
- Frank Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding pad structure and method for manufacturing the bonding pad...
- Patent number 6,140,709
- Issue date Oct 31, 2000
- Robert Bosch GmbH
- Horst Muenzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of producing acceleration sensors
- Patent number 5,937,275
- Issue date Aug 10, 1999
- Robert Bosch GmbH
- Horst Munzel
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MICROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING A MICROMECHANIC...
- Publication number 20200198966
- Publication date Jun 25, 2020
- ROBERT BOSCH GmbH
- Eckhard Graf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS COMPONENT HAVING TWO DIFFERENT INTERNAL PRESSURES
- Publication number 20180346324
- Publication date Dec 6, 2018
- ROBERT BOSCH GmbH
- Achim Breitling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPONENT HAVING A VIA AND METHOD FOR MANUFACTURING IT
- Publication number 20150137329
- Publication date May 21, 2015
- ROBERT BOSCH GmbH
- Julian Gonska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Component Having a Via and Method for Manufacturing It
- Publication number 20130147020
- Publication date Jun 13, 2013
- Julian Gonska
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A TRENCH ST...
- Publication number 20120049301
- Publication date Mar 1, 2012
- Roland Scheuerer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FILLING CAVITIES IN WAFERS, CORRESPONDINGLY FILLED BLIND...
- Publication number 20120038030
- Publication date Feb 16, 2012
- Jens Frey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR MODULE
- Publication number 20120032283
- Publication date Feb 9, 2012
- Jens FREY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ESTABLISHING AND CLOSING A TRENCH OF A SEMICONDUCTOR COM...
- Publication number 20110169143
- Publication date Jul 14, 2011
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A TRENCH ST...
- Publication number 20100133630
- Publication date Jun 3, 2010
- Roland Scheuerer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A FILLER LA...
- Publication number 20100089868
- Publication date Apr 15, 2010
- Roland Scheuerer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical Component Having Multiple Caverns, and Manufacturin...
- Publication number 20080136000
- Publication date Jun 12, 2008
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and corresponsing production method
- Publication number 20050253240
- Publication date Nov 17, 2005
- Wolfgang Nuechter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for anodic bonding of wafers and device
- Publication number 20050112843
- Publication date May 26, 2005
- Frank Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micromechanical cap structure and a corresponding production method
- Publication number 20050045973
- Publication date Mar 3, 2005
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component as well as a method for producing a micro...
- Publication number 20040195638
- Publication date Oct 7, 2004
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for joining a silicon plate to a second plate
- Publication number 20040082145
- Publication date Apr 29, 2004
- Frank Reichenbach
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Method for producing a micromechanical component, and a component p...
- Publication number 20030141561
- Publication date Jul 31, 2003
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component as well as a method for producing a micro...
- Publication number 20030001221
- Publication date Jan 2, 2003
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for sectioning a substrate wafer into a plurality of substra...
- Publication number 20010055855
- Publication date Dec 27, 2001
- Frank Fischer
- H01 - BASIC ELECTRIC ELEMENTS

Eckhard Graf

Person

Patents Grantslast 30 patents

Micromechanical device and method for manufacturing a micromechanic...

MEMS component having two different internal pressures

Component having a via and method for manufacturing it

Sensor module

Method for filling cavities in wafers, correspondingly filled blind...

Method for establishing and closing a trench of a semiconductor com...

Method for producing a micromechanical component having a trench st...

Method for producing a micromechanical component having a filler la...

Micromechanical component having multiple caverns, and manufacturin...

Method for producing a micromechanical component having a trench st...

Micromechanical cap structure and a corresponding production method

Micromechanical component as well as a method for producing a micro...

Method for joining a silicon plate to a second plate

Method for manufacturing a micromechanical component and a componen...

Micromechanical component as well as a method for producing a micro...

Micromechanical component

Method for sectioning a substrate wafer into a plurality of substra...

Bonding pad structure and method for manufacturing the bonding pad...

Method of producing acceleration sensors

Patents Applicationslast 30 patents

MICROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING A MICROMECHANIC...

MEMS COMPONENT HAVING TWO DIFFERENT INTERNAL PRESSURES

COMPONENT HAVING A VIA AND METHOD FOR MANUFACTURING IT

Component Having a Via and Method for Manufacturing It

METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A TRENCH ST...

METHOD FOR FILLING CAVITIES IN WAFERS, CORRESPONDINGLY FILLED BLIND...

SENSOR MODULE

METHOD FOR ESTABLISHING AND CLOSING A TRENCH OF A SEMICONDUCTOR COM...

METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A TRENCH ST...

METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A FILLER LA...

Micromechanical Component Having Multiple Caverns, and Manufacturin...

Micromechanical component and corresponsing production method

Method for anodic bonding of wafers and device

Micromechanical cap structure and a corresponding production method

Micromechanical component as well as a method for producing a micro...

Method for joining a silicon plate to a second plate

Method for producing a micromechanical component, and a component p...

Micromechanical component as well as a method for producing a micro...

Method for sectioning a substrate wafer into a plurality of substra...