Eckhard Marx

Person

Redeburg, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Noninvasive method for characterizing and identifying embedded micr...
- Patent number 7,262,837
- Issue date Aug 28, 2007
- Infineon Technologies AG
- Pierre-Yves Guittet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Measurement configuration including a vehicle and method for perfor...
- Patent number 6,935,201
- Issue date Aug 30, 2005
- Infineon Technologies AG
- Michael Abraham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer scribing method and wafer scribing device
- Patent number 6,914,006
- Issue date Jul 5, 2005
- FREESCALE SEMICONDUCTOR, INC.
- Martin Peiter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device identification apparatus
- Patent number 6,866,200
- Issue date Mar 15, 2005
- Infineon Technologies SG300 GmbH & Co. KG
- Eckhard Marx
- G01 - MEASURING TESTING
Information Patent Grant
Self-supporting adaptable metrology device
- Patent number 6,745,637
- Issue date Jun 8, 2004
- Infineon Technologies SC300 GmbH & Co. KG
- Volker Tegeder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer marking
- Patent number 6,261,382
- Issue date Jul 17, 2001
- Infineon Technologies AG
- Eckhard Marx
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Configuration for the automatic inscription or reinscription of wafers
- Patent number 6,147,321
- Issue date Nov 14, 2000
- Infineon Technologies AG
- Eckhard Marx
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Noninvasive method for characterizing and identifying embedded micr...
- Publication number 20050018171
- Publication date Jan 27, 2005
- Pierre-Yves Guittet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor device identification apparatus
- Publication number 20040238636
- Publication date Dec 2, 2004
- Eckhard Marx
- G01 - MEASURING TESTING
Information Patent Application
Configuration and method for detecting defects on a substrate in a...
- Publication number 20040117055
- Publication date Jun 17, 2004
- Torsten Seidel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measurement configuration including a vehicle and method for perfor...
- Publication number 20040050189
- Publication date Mar 18, 2004
- Michael Abraham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer scribing method and wafer scribing device
- Publication number 20030109141
- Publication date Jun 12, 2003
- Motorola, Inc. Semiconductor 300 GmbH & Co. KG
- Martin Peiter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Self-supporting adaptable metrology device
- Publication number 20020152808
- Publication date Oct 24, 2002
- Volker Tegeder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for removing an organic material from a semico...
- Publication number 20020058345
- Publication date May 16, 2002
- Anne Kurtenbach
- G01 - MEASURING TESTING

Eckhard Marx

Person

Patents Grantslast 30 patents

Noninvasive method for characterizing and identifying embedded micr...

Measurement configuration including a vehicle and method for perfor...

Wafer scribing method and wafer scribing device

Semiconductor device identification apparatus

Self-supporting adaptable metrology device

Wafer marking

Configuration for the automatic inscription or reinscription of wafers

Patents Applicationslast 30 patents

Noninvasive method for characterizing and identifying embedded micr...

Semiconductor device identification apparatus

Configuration and method for detecting defects on a substrate in a...

Measurement configuration including a vehicle and method for perfor...

Wafer scribing method and wafer scribing device

Self-supporting adaptable metrology device

Apparatus and method for removing an organic material from a semico...