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Ed Ma
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Alameda, CA, US
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last 30 patents
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Patent Grant
Multiplexing EUV sources in reticle inspection
Patent number
8,917,432
Issue date
Dec 23, 2014
KLA-Tencor Corporation
Daniel Wack
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
MULTIPLEXING EUV SOURCES IN RETICLE INSPECTION
Publication number
20140036333
Publication date
Feb 6, 2014
KLA-Tencor Corporation
Daniel Wack
G02 - OPTICS