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Ed Yum
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Fremont, CA, US
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last 30 patents
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Patent Grant
Methods and systems for detecting defects in a reticle design pattern
Patent number
8,213,704
Issue date
Jul 3, 2012
KLA-Tencor Corp.
Ingrid B. Peterson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
METHODS AND SYSTEMS FOR DETECTING DEFECTS IN A RETICLE DESIGN PATTERN
Publication number
20090016595
Publication date
Jan 15, 2009
Ingrid B. Peterson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY