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Eddy Chiang
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Tao-Yuan, TW
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last 30 patents
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Patent Grant
Method of forming contact using non-conformal dielectric liner
Patent number
6,458,706
Issue date
Oct 1, 2002
Vanguard International Semiconductor Corporation
Eddy Chiang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Multiple etch contact etching method incorporating post contact etc...
Patent number
6,376,384
Issue date
Apr 23, 2002
Vanguard International Semiconductor Corporation
Tzu-Shih Yen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming self-aligned contact with liner
Patent number
6,306,759
Issue date
Oct 23, 2001
Vanguard International Semiconductor Corporation
Tzu-Shih Yen
H01 - BASIC ELECTRIC ELEMENTS