Eddy J. Song

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-gas centrally cooled showerhead design
- Patent number 9,449,859
- Issue date Sep 20, 2016
- Applied Materials, Inc.
- Eddy J. Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...