TREA

Eddy Lay

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  • Hsinchu City, TW
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Patents Grantslast 30 patents

  • Information Patent Grant

    Vertical furnace for improving wafer uniformity
    • Patent number 9,605,345
    • Issue date Mar 28, 2017
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Eddy Lay
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    IN-SITU DRY CLEAN OF TUBE FURNACE
    • Publication number 20220356570
    • Publication date Nov 10, 2022
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Eddy Lay
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    IN-SITU DRY CLEAN OF TUBE FURNACE
    • Publication number 20190093218
    • Publication date Mar 28, 2019
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Eddy Lay
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vertical Furnace for Improving Wafer Uniformity
    • Publication number 20150053136
    • Publication date Feb 26, 2015
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Eddy Lay
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...