Edmund Burke

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West Newbury, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
GCIB etching method for adjusting fin height of finFET devices
- Patent number 9,209,033
- Issue date Dec 8, 2015
- TEL Epion Inc.
- Luis Fernandez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-thin film formation using gas cluster ion beam processing
- Patent number 8,226,835
- Issue date Jul 24, 2012
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GCIB ETCHING METHOD FOR ADJUSTING FIN HEIGHT OF FINFET DEVICES
- Publication number 20150056815
- Publication date Feb 26, 2015
- TEL Epion Inc.
- Luis FERNANDEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONTROLLING A RESISTIVE PROPERTY IN A RESISTIVE ELEMENT...
- Publication number 20120225532
- Publication date Sep 6, 2012
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-THIN FILM FORMATION USING GAS CLUSTER ION BEAM PROCESSING
- Publication number 20100227142
- Publication date Sep 9, 2010
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-SEQUENCE FILM DEPOSITION AND GROWTH USING GAS CLUSTER ION BEA...
- Publication number 20100200774
- Publication date Aug 12, 2010
- TEL Epion Inc.
- Edmund Burke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING TRENCH ISOLATION USING GAS CLUSTER ION BEAM PROC...
- Publication number 20100193898
- Publication date Aug 5, 2010
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...