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Edmund J. Winder
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Kirkland, WA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Monitoring plasma ion implantation systems for fault detection and...
Patent number
7,878,145
Issue date
Feb 1, 2011
Varian Semiconductor Equipment Associates, Inc.
Ziwei Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conformal doping apparatus and method
Patent number
7,524,743
Issue date
Apr 28, 2009
Varian Semiconductor Equipment Associates, Inc.
Atul Gupta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Technique for boron implantation
Patent number
7,397,048
Issue date
Jul 8, 2008
Varian Semiconductor Equipment Associates, Inc.
Vikram Singh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
TECHNIQUE FOR USING AN IMPROVED SHIELD RING IN PLASMA-BASED ION IMP...
Publication number
20080160170
Publication date
Jul 3, 2008
Varian Semiconductor Equipment Assoicates, Inc.
Timothy Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Monitoring plasma ion implantation systems for fault detection and...
Publication number
20080026133
Publication date
Jan 31, 2008
Varian Semiconductor Equipment Associates, Inc.
Ziwei Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Immersion Ion Source With Low Effective Antenna Voltage
Publication number
20070170867
Publication date
Jul 26, 2007
Varian Semiconductor Equipment Associates, Inc.
Harold M. Persing
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUE FOR ATOMIC LAYER DEPOSITION
Publication number
20070087581
Publication date
Apr 19, 2007
Varian Semiconductor Equipment Associates, Inc.
Vikram SINGH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONFORMAL DOPING APPARATUS AND METHOD
Publication number
20070087574
Publication date
Apr 19, 2007
Varian Semiconductor Equipment Associates, Inc.
Atul Gupta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONFORMAL DOPING APPARATUS AND METHOD
Publication number
20070084564
Publication date
Apr 19, 2007
Varian Semiconductor Equipment Associates, Inc.
Atul Gupta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Technique for atomic layer deposition
Publication number
20070065576
Publication date
Mar 22, 2007
Vikram Singh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Technique for boron implantation
Publication number
20060063360
Publication date
Mar 23, 2006
Vikram Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma immersion ion implantion apparatus and method
Publication number
20050205211
Publication date
Sep 22, 2005
Vikram Singh
H01 - BASIC ELECTRIC ELEMENTS