Edmund L. Ma

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Alameda, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
End effector for substrate handling
- Patent number 6,283,355
- Issue date Sep 4, 2001
- Lam Research Corporation
- Edmund L. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End effector for substrate handling and method for making the same
- Patent number 6,073,828
- Issue date Jun 13, 2000
- Lam Research Corporation
- Edmund L. Ma
- H01 - BASIC ELECTRIC ELEMENTS