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Eduard Hoeberichts
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Mol, NL
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last 30 patents
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Patent Grant
Scanning lithographic apparatus and device manufacturing method
Patent number
7,609,362
Issue date
Oct 27, 2009
ASML Netherlands B.V.
Pieter Willem Herman De Jager
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060098175
Publication date
May 11, 2006
ASML Netherlands B.V.
Pieter Willem Herman De Jager
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY