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Eduard Karl Lorenz
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Truebbach, CH
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last 30 patents
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Patent Grant
Target comprising thickness profiling for an RF magnetron
Patent number
6,916,407
Issue date
Jul 12, 2005
Unaxis Trading AG
Stephan Voser
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Target comprising thickness profiling for an rf magnetron
Publication number
20040050689
Publication date
Mar 18, 2004
Stephan Voser
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...