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Edward A. Fitzgerald
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Barrington, RI, US
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last 30 patents
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Patent Grant
Method for removing metal impurities from resist components
Patent number
5,446,125
Issue date
Aug 29, 1995
OCG Microelectronic Materials, Inc.
Kenji Honda
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...