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Edward A. Rietman
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Madison, Morris County, NJ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Carrier head with controllable struts for improved wafer planarity
Patent number
6,402,590
Issue date
Jun 11, 2002
Lucent Technologies Inc.
Stephen A. Neston
B24 - GRINDING POLISHING
Information
Patent Grant
Dynamic data visualization
Patent number
6,021,215
Issue date
Feb 1, 2000
Lucent Technologies, Inc.
Avinoam Kornblit
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma etch end point detection process
Patent number
5,877,407
Issue date
Mar 2, 1999
Lucent Technologies Inc.
Gardy Cadet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Active neural network control of wafer attributes in a plasma etch...
Patent number
5,737,496
Issue date
Apr 7, 1998
Lucent Technologies Inc.
Robert Charles Frye
G05 - CONTROLLING REGULATING
Information
Patent Grant
Active neural network determination of endpoint in a plasma etch pr...
Patent number
5,653,894
Issue date
Aug 5, 1997
Lucent Technologies Inc.
Dale Edward Ibbotson
G05 - CONTROLLING REGULATING
Information
Patent Grant
Active neural network control of wafer attributes in a plasma etch...
Patent number
5,467,883
Issue date
Nov 21, 1995
AT&T Corp.
Robert C. Frye
G05 - CONTROLLING REGULATING
Information
Patent Grant
Manufacturing adjustment during article fabrication
Patent number
5,283,746
Issue date
Feb 1, 1994
AT&T Bell Laboratories
Kevin D. Cummings
G06 - COMPUTING CALCULATING COUNTING