Edward Golubovsky

Person

  • San Jose, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Pad carrier for horizontal pre-clean module

    • Patent number 11,942,319
    • Issue date Mar 26, 2024
    • Applied Materials, Inc.
    • Edward Golubovsky
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer processing tools and methods thereof

    • Patent number 11,749,552
    • Issue date Sep 5, 2023
    • Applied Materials, Inc.
    • Jagan Rangarajan
    • B24 - GRINDING POLISHING
  • Information Patent Grant

    Non-contact clean module

    • Patent number 11,721,563
    • Issue date Aug 8, 2023
    • Applied Materials, Inc.
    • Jagan Rangarajan
    • B08 - CLEANING
  • Information Patent Grant

    Replaceable substrate carrier interfacing film

    • Patent number D947802
    • Issue date Apr 5, 2022
    • Applied Materials, Inc.
    • Clinton Sakata
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Non-contact clean module

    • Patent number 11,289,347
    • Issue date Mar 29, 2022
    • Applied Materials, Inc.
    • Jagan Rangarajan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Non-contact clean module

    • Patent number 11,158,524
    • Issue date Oct 26, 2021
    • Applied Materials, Inc.
    • Jagan Rangarajan
    • B08 - CLEANING
  • Information Patent Grant

    Ground shield for a PVD chamber

    • Patent number 7,713,390
    • Issue date May 11, 2010
    • Applied Materials, Inc.
    • Edward Golubovsky
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents