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Non-contact clean module
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Patent number 11,721,563
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Issue date Aug 8, 2023
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Applied Materials, Inc.
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Jagan Rangarajan
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B08 - CLEANING
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Non-contact clean module
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Patent number 11,289,347
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Issue date Mar 29, 2022
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Applied Materials, Inc.
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Jagan Rangarajan
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H01 - BASIC ELECTRIC ELEMENTS
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Non-contact clean module
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Patent number 11,158,524
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Issue date Oct 26, 2021
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Applied Materials, Inc.
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Jagan Rangarajan
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B08 - CLEANING
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