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Edward Hage
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Helmond, NL
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last 30 patents
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Patent Grant
Support device, lithographic apparatus and device manufacturing method
Patent number
9,977,349
Issue date
May 22, 2018
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and slide asse...
Patent number
7,265,817
Issue date
Sep 4, 2007
ASML Netherlands B.V.
Edward Hage
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for determining the values of stiffness and dampe...
Patent number
6,962,073
Issue date
Nov 8, 2005
Ten Cate Thiolon B.V.
Edward Hage
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR ASSEMBLY OF A RETICLE ASSEMBLY
Publication number
20220155675
Publication date
May 19, 2022
ASML NETHERLANDS B.V.
Ilya MALAKHOVSKY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160334718
Publication date
Nov 17, 2016
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and slide asse...
Publication number
20050083508
Publication date
Apr 21, 2005
ASML NETHERLANDS B.V.
Edward Hage
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY