Edward J. Ladny

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Lynn, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Charge integration based electrostatic clamp health monitor
- Patent number 10,324,121
- Issue date Jun 18, 2019
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGE INTEGRATION BASED ELECTROSTATIC CLAMP HEALTH MONITOR
- Publication number 20140188416
- Publication date Jul 3, 2014
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- G01 - MEASURING TESTING