Edward K. McIntyre Jr.

Person

West Roxbury, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method to provide consistent electrostatic clamping through real ti...
- Patent number 10,692,749
- Issue date Jun 23, 2020
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charge integration based electrostatic clamp health monitor
- Patent number 10,324,121
- Issue date Jun 18, 2019
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for electrostatic clamping of workpieces
- Patent number 9,871,473
- Issue date Jan 16, 2018
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
External cathode ion source
- Patent number 8,502,161
- Issue date Aug 6, 2013
- Semequip, Inc.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for extending equipment uptime in ion implantation
- Patent number 7,875,125
- Issue date Jan 25, 2011
- Semequip, Inc.
- Kevin S. Cook
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
External cathode ion source
- Patent number 7,838,850
- Issue date Nov 23, 2010
- Semequip, Inc.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanism for prevention of neutron radiation in ion implanter beam...
- Patent number 6,608,315
- Issue date Aug 19, 2003
- Kourosh Saadatmand
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Continuously variable aperture for high-energy ion implanter
- Patent number 6,207,964
- Issue date Mar 27, 2001
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time of flight energy measurement apparatus for an ion beam implanter
- Patent number 6,137,112
- Issue date Oct 24, 2000
- Eaton Corporation
- Edward K. McIntyre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generating source for use in an ion implanter
- Patent number 5,497,006
- Issue date Mar 5, 1996
- Eaton Corporation
- Piero Sferlazzo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broad beam flux density control
- Patent number 5,218,210
- Issue date Jun 8, 1993
- Eaton Corporation
- Edward K. McIntyre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam control system
- Patent number 5,023,458
- Issue date Jun 11, 1991
- Eaton Corporation
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD TO PROVIDE CONSISTENT ELECTROSTATIC CLAMPING THROUGH REAL TI...
- Publication number 20190172743
- Publication date Jun 6, 2019
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR ELECTROSTATIC CLAMPING OF WORKPIECES
- Publication number 20160087557
- Publication date Mar 24, 2016
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
CHARGE INTEGRATION BASED ELECTROSTATIC CLAMP HEALTH MONITOR
- Publication number 20140188416
- Publication date Jul 3, 2014
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- G01 - MEASURING TESTING
Information Patent Application
EXTERNAL CATHODE ION SOURCE
- Publication number 20100320395
- Publication date Dec 23, 2010
- SemEquip, Inc.
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL POWER METERING AND BILLING NETWORK
- Publication number 20100306033
- Publication date Dec 2, 2010
- Dror Oved
- B60 - VEHICLES IN GENERAL
Information Patent Application
ION SOURCE GAS REACTOR
- Publication number 20090183679
- Publication date Jul 23, 2009
- Edward McIntyre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION
- Publication number 20090081874
- Publication date Mar 26, 2009
- Kevin S. Cook
- B08 - CLEANING
Information Patent Application
EXTERNAL CATHODE ION SOURCE
- Publication number 20090014667
- Publication date Jan 15, 2009
- Sami K. Hahto
- H01 - BASIC ELECTRIC ELEMENTS

Edward K. McIntyre Jr.

Person

Patents Grantslast 30 patents

Method to provide consistent electrostatic clamping through real ti...

Charge integration based electrostatic clamp health monitor

System and method for electrostatic clamping of workpieces

External cathode ion source

Method for extending equipment uptime in ion implantation

External cathode ion source

Mechanism for prevention of neutron radiation in ion implanter beam...

Continuously variable aperture for high-energy ion implanter

Time of flight energy measurement apparatus for an ion beam implanter

Ion generating source for use in an ion implanter

Broad beam flux density control

Ion beam control system

Patents Applicationslast 30 patents

METHOD TO PROVIDE CONSISTENT ELECTROSTATIC CLAMPING THROUGH REAL TI...

SYSTEM AND METHOD FOR ELECTROSTATIC CLAMPING OF WORKPIECES

CHARGE INTEGRATION BASED ELECTROSTATIC CLAMP HEALTH MONITOR

EXTERNAL CATHODE ION SOURCE

ELECTRICAL POWER METERING AND BILLING NETWORK

ION SOURCE GAS REACTOR

METHOD FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION

EXTERNAL CATHODE ION SOURCE