Edward L. Sill

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for minimizing as-deposited stress in tungste...
- Patent number 6,130,159
- Issue date Oct 10, 2000
- Genus, Inc.
- Sien G. Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for minimizing as-deposited stress in tungsten silicide films
- Patent number 5,963,836
- Issue date Oct 5, 1999
- Genus, Inc.
- Sien G. Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabrication of semiconductor device having a planar confi...
- Patent number 4,803,173
- Issue date Feb 7, 1989
- North American Philips Corporation, Signetics Division
- Edward L. Sill
- H01 - BASIC ELECTRIC ELEMENTS