Edward MacIntosh

Person

Amesbury, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Platen for reducing particle contamination on a substrate and a met...
- Patent number 10,658,207
- Issue date May 19, 2020
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen for reducing particle contamination on a substrate and a met...
- Patent number 9,953,849
- Issue date Apr 24, 2018
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for holding a plurality of substrates for proc...
- Patent number 9,218,990
- Issue date Dec 22, 2015
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Media carrier
- Patent number 8,746,666
- Issue date Jun 10, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Richard Hertel
- G11 - INFORMATION STORAGE
Information Patent Grant
Platen ground pin for connecting substrate to ground
- Patent number 8,681,472
- Issue date Mar 25, 2014
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monitor system and method for semiconductor processes
- Patent number 7,309,997
- Issue date Dec 18, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for implementing a variable aperture lens in an ion impla...
- Patent number 7,279,687
- Issue date Oct 9, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Gordon C. Angel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for two-dimensional ion beam profiling
- Patent number 7,109,499
- Issue date Sep 19, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Gordon C. Angel
- G01 - MEASURING TESTING
Information Patent Grant
Wafer transfer system
- Patent number 4,836,733
- Issue date Jun 6, 1989
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system
- Patent number 4,449,885
- Issue date May 22, 1984
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Platen For Reducing Particle Contamination On A Substrate and a Met...
- Publication number 20180233386
- Publication date Aug 16, 2018
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Platen For Reducing Particle Contamination On A Substrate And A Met...
- Publication number 20150279704
- Publication date Oct 1, 2015
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR HOLDING A PLURALITY OF SUBSTRATES FOR PROC...
- Publication number 20130089403
- Publication date Apr 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEDIA CARRIER
- Publication number 20120280442
- Publication date Nov 8, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Richard J. Hertel
- G11 - INFORMATION STORAGE
Information Patent Application
PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A MET...
- Publication number 20090317964
- Publication date Dec 24, 2009
- Varian Semiconductor Equipment Associates, Inc.
- David E. SUURONEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for implementing a variable aperture lens in an ion impla...
- Publication number 20070045557
- Publication date Mar 1, 2007
- Gordon C. Angel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and methods for two-dimensional ion beam profiling
- Publication number 20060097195
- Publication date May 11, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Gordon C. Angel
- G01 - MEASURING TESTING

Edward MacIntosh

Person

Patents Grantslast 30 patents

Platen for reducing particle contamination on a substrate and a met...

Platen for reducing particle contamination on a substrate and a met...

Method and apparatus for holding a plurality of substrates for proc...

Media carrier

Platen ground pin for connecting substrate to ground

Monitor system and method for semiconductor processes

Technique for implementing a variable aperture lens in an ion impla...

Apparatus and methods for two-dimensional ion beam profiling

Wafer transfer system

Wafer transfer system

Patents Applicationslast 30 patents

Platen For Reducing Particle Contamination On A Substrate and a Met...

Platen For Reducing Particle Contamination On A Substrate And A Met...

METHOD AND APPARATUS FOR HOLDING A PLURALITY OF SUBSTRATES FOR PROC...

MEDIA CARRIER

PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A MET...

Technique for implementing a variable aperture lens in an ion impla...

Apparatus and methods for two-dimensional ion beam profiling