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Edward P. Holtaway
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Carlsbad, CA, US
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last 30 patents
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Patent Grant
Very high repetition rate narrow band gas discharge laser system
Patent number
7,006,547
Issue date
Feb 28, 2006
Cymer, Inc.
Thomas D. Steiger
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Very high repetition rate narrow band gas discharge laser system
Publication number
20060209916
Publication date
Sep 21, 2006
Edward P. Holtaway
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Very high repetition rate narrow band gas discharge laser system
Publication number
20050226300
Publication date
Oct 13, 2005
Thomas D. Steiger
H01 - BASIC ELECTRIC ELEMENTS