Edward Siqi Luo

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Gas management system
- Patent number 11,949,202
- Issue date Apr 2, 2024
- Cymer, LLC
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas management system
- Patent number 11,949,203
- Issue date Apr 2, 2024
- Cymer, LLC
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine detection in a gas discharge light source
- Patent number 11,754,541
- Issue date Sep 12, 2023
- Cymer, LLC
- Joshua Jon Thornes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for tuning discharge performance in a laser chamber
- Patent number 11,349,273
- Issue date May 31, 2022
- Cymer, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHO...
- Publication number 20230163551
- Publication date May 25, 2023
- CYMER, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER
- Publication number 20230016894
- Publication date Jan 19, 2023
- CYMER, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TUNING DISCHARGE PERFORMANCE IN A LASER CHAMBER
- Publication number 20210066880
- Publication date Mar 4, 2021
- CYMER, LLC
- Edward Siqi Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS MANAGEMENT SYSTEM
- Publication number 20200358241
- Publication date Nov 12, 2020
- Yzzer Roman Gutierrez
- G01 - MEASURING TESTING
Information Patent Application
GAS MANAGEMENT SYSTEM
- Publication number 20200358240
- Publication date Nov 12, 2020
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUORINE DETECTION IN A GAS DISCHARGE LIGHT SOURCE
- Publication number 20200340965
- Publication date Oct 29, 2020
- CYMER, LLC
- Joshua Jon Thornes
- H01 - BASIC ELECTRIC ELEMENTS