Edward T. Smith

Person

  • Somerville, MA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Method of making a rim-type phase-shift mask

    • Patent number 5,484,672
    • Issue date Jan 16, 1996
    • International Business Machines Corporation
    • Stanislav P. Bajuk
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY