Edward W. Budiarto

Person

Milipitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical metrology models for in-line film thickness measurements
- Patent number 12,062,583
- Issue date Aug 13, 2024
- Applied Materials Israel Ltd.
- Eric Chin Hong Ng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,613,812
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems to measure properties of products on a moving b...
- Patent number 11,609,183
- Issue date Mar 21, 2023
- Applied Materials, Inc.
- Todd J. Egan
- G01 - MEASURING TESTING
Information Patent Grant
Spectrum shaping devices and techniques for optical characterizatio...
- Patent number 11,226,234
- Issue date Jan 18, 2022
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Optical stack deposition and on-board metrology
- Patent number 10,886,155
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Mingwei Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD process
- Patent number 10,793,954
- Issue date Oct 6, 2020
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ metrology method for thickness measurement during PECVD pro...
- Patent number 10,527,407
- Issue date Jan 7, 2020
- Applied Materials, Inc.
- Khokan C. Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monitoring system for deposition and method of operation thereof
- Patent number 10,522,375
- Issue date Dec 31, 2019
- Applied Materials, Inc.
- Edward W. Budiarto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-situ metrology method for thickness measurement during PECVD pro...
- Patent number 10,281,261
- Issue date May 7, 2019
- Applied Materials, Inc.
- Khokan C. Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electroplating tool with feedback of metal thickness distribution a...
- Patent number 10,260,855
- Issue date Apr 16, 2019
- Applied Materials, Inc.
- Todd J. Egan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Fast and continuous eddy-current metrology of a conductive film
- Patent number 10,234,261
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Edward W. Budiarto
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
PECVD process
- Patent number 10,060,032
- Issue date Aug 28, 2018
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus and process
- Patent number 10,030,306
- Issue date Jul 24, 2018
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monitoring system for deposition and method of operation thereof
- Patent number 9,870,935
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Edward W. Budiarto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD process
- Patent number 9,816,187
- Issue date Nov 14, 2017
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 9,458,537
- Issue date Oct 4, 2016
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film measurement
- Patent number 9,335,151
- Issue date May 10, 2016
- Applied Materials, Inc.
- Edward W. Budiarto
- G01 - MEASURING TESTING
Information Patent Grant
PECVD process
- Patent number 9,157,730
- Issue date Oct 13, 2015
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- G01 - MEASURING TESTING
Information Patent Grant
Metrology system for imaging workpiece surfaces at high robot trans...
- Patent number 8,698,889
- Issue date Apr 15, 2014
- Applied Materials, Inc.
- Abraham Ravid
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Metrology of thin film devices using an addressable micromirror array
- Patent number 8,130,373
- Issue date Mar 6, 2012
- Applied Materials, Inc.
- Edgar Genio
- G01 - MEASURING TESTING
Information Patent Grant
Spectrometric metrology of workpieces using a permanent window as a...
- Patent number 8,027,031
- Issue date Sep 27, 2011
- Applied Materials, Inc.
- Edgar Genio
- G01 - MEASURING TESTING
Information Patent Grant
Metrology of thin film devices using an addressable micromirror array
- Patent number 8,018,586
- Issue date Sep 13, 2011
- Applied Materials, Inc.
- Edgar Genio
- G01 - MEASURING TESTING
Information Patent Grant
Spectrometric metrology of workpieces using a permanent window as a...
- Patent number 7,911,603
- Issue date Mar 22, 2011
- Applied Materials, Inc.
- Edgar Genio
- G01 - MEASURING TESTING
Information Patent Grant
Use of scanning beam for differential evaluation of adjacent region...
- Patent number 7,190,458
- Issue date Mar 13, 2007
- Applied Materials, Inc.
- Peter G. Borden
- G01 - MEASURING TESTING
Information Patent Grant
Differential evaluation of adjacent regions for change in reflectivity
- Patent number 7,136,163
- Issue date Nov 14, 2006
- Applied Materials, Inc.
- Peter G. Borden
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IN-SITU REFLECTOMETRY FOR REAL-TIME PROCESS CONTROL
- Publication number 20240142223
- Publication date May 2, 2024
- Applied Materials, Inc.
- Khokan C. PAUL
- G01 - MEASURING TESTING
Information Patent Application
FINGERPRINTING AND PROCESS CONTROL OF PHOTOSENSITIVE FILM DEPOSITIO...
- Publication number 20240027916
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- RUIYING HAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS TO MEASURE PROPERTIES OF MOVING PRODUCTS IN DEV...
- Publication number 20230213444
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Todd J. Egan
- G01 - MEASURING TESTING
Information Patent Application
PECVD PROCESS
- Publication number 20230193466
- Publication date Jun 22, 2023
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIAL PATTERN LOADING MEASUREMENT WITH IMAGING METROLOGY
- Publication number 20220310425
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Eric Chin Hong Ng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL METROLOGY MODELS FOR IN-LINE FILM THICKNESS MEASUREMENTS
- Publication number 20220290974
- Publication date Sep 15, 2022
- APPLIED MATERIALS ISRAEL LTD.
- Eric Chin Hong Ng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS TO MEASURE PROPERTIES OF PRODUCTS ON A MOVING B...
- Publication number 20220057323
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Todd J. Egan
- G01 - MEASURING TESTING
Information Patent Application
SPECTRUM SHAPING DEVICES AND TECHNIQUES FOR OPTICAL CHARACTERIZATIO...
- Publication number 20210223102
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G02 - OPTICS
Information Patent Application
PECVD PROCESS
- Publication number 20200399756
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL STACK DEPOSITION AND ON-BOARD METROLOGY
- Publication number 20200227294
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Mingwei ZHU
- G01 - MEASURING TESTING
Information Patent Application
METHODS, APPARATUSES AND SYSTEMS FOR CONDUCTIVE FILM LAYER THICKNES...
- Publication number 20190390949
- Publication date Dec 26, 2019
- KAI WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...
- Publication number 20190212128
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- Khokan C. PAUL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20180258535
- Publication date Sep 13, 2018
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Monitoring System For Deposition And Method Of Operation Thereof
- Publication number 20180114711
- Publication date Apr 26, 2018
- Applied Materials, Inc.
- Edward W. Budiarto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED ILLUMINATION EFFICIENCY IN MASKLESS, PROGRAMMABLE OPTICAL...
- Publication number 20180074311
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Edward BUDIARTO
- G02 - OPTICS
Information Patent Application
PECVD PROCESS
- Publication number 20180066364
- Publication date Mar 8, 2018
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENDPOINT DETECTION FOR A CHAMBER CLEANING PROCESS
- Publication number 20180057935
- Publication date Mar 1, 2018
- Applied Materials, Inc.
- Edward BUDIARTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD PROCESS
- Publication number 20170016118
- Publication date Jan 19, 2017
- Applied Materials, Inc.
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...
- Publication number 20160370173
- Publication date Dec 22, 2016
- Applied Materials, Inc.
- Khokan C. PAUL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONITORING SYSTEM FOR DEPOSITION AND METHOD OF OPERATION THEREOF
- Publication number 20160181134
- Publication date Jun 23, 2016
- Applied Materials, Inc.
- Edward W. Budiarto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD PROCESS
- Publication number 20160017497
- Publication date Jan 21, 2016
- Applied Materials, Inc.
- NAGARAJAN RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD APPARATUS AND PROCESS
- Publication number 20150226540
- Publication date Aug 13, 2015
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASUREMENT OF FILM THICKNESS ON AN ARBITRARY SUBSTRATE
- Publication number 20150203966
- Publication date Jul 23, 2015
- Applied Materials, Inc.
- Edward BUDIARTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROPLATING TOOL WITH FEEDBACK OF METAL THICKNESS DISTRIBUTION A...
- Publication number 20140367267
- Publication date Dec 18, 2014
- Applied Materials, Inc.
- Todd J. Egan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
FAST AND CONTINUOUS EDDY-CURRENT METROLOGY OF A CONDUCTIVE FILM
- Publication number 20140367266
- Publication date Dec 18, 2014
- Applied Materials, Inc.
- Edward J. Budiarto
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PECVD PROCESS
- Publication number 20140118751
- Publication date May 1, 2014
- Nagarajan RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM MEASUREMENT
- Publication number 20140117982
- Publication date May 1, 2014
- Applied Materials, Inc.
- Edward W. BUDIARTO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR THE FORMATION OF SOLAR CELLS WITH SELECTIV...
- Publication number 20130095579
- Publication date Apr 18, 2013
- Applied Materials Italia S.R.L.
- Todd Egan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY OF THIN FILM DEVICES USING AN ADDRESSABLE MICROMIRROR ARRAY
- Publication number 20110254953
- Publication date Oct 20, 2011
- Applied Materials, Inc.
- EDGAR GENIO
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY SYSTEM FOR IMAGING WORKPIECE SURFACES AT HIGH ROBOT TRANS...
- Publication number 20110199476
- Publication date Aug 18, 2011
- Applied Materials, Inc.
- Abraham Ravid
- G05 - CONTROLLING REGULATING

Edward W. Budiarto

Person

Patents Grantslast 30 patents

Optical metrology models for in-line film thickness measurements

PECVD process

PECVD process

Methods and systems to measure properties of products on a moving b...

Spectrum shaping devices and techniques for optical characterizatio...

Optical stack deposition and on-board metrology

PECVD process

In-situ metrology method for thickness measurement during PECVD pro...

Monitoring system for deposition and method of operation thereof

In-situ metrology method for thickness measurement during PECVD pro...

Electroplating tool with feedback of metal thickness distribution a...

Fast and continuous eddy-current metrology of a conductive film

PECVD process

PECVD apparatus and process

Monitoring system for deposition and method of operation thereof

PECVD process

PECVD process

Film measurement

PECVD process

Metrology system for imaging workpiece surfaces at high robot trans...

Metrology of thin film devices using an addressable micromirror array

Spectrometric metrology of workpieces using a permanent window as a...

Metrology of thin film devices using an addressable micromirror array

Spectrometric metrology of workpieces using a permanent window as a...

Use of scanning beam for differential evaluation of adjacent region...

Differential evaluation of adjacent regions for change in reflectivity

Patents Applicationslast 30 patents

IN-SITU REFLECTOMETRY FOR REAL-TIME PROCESS CONTROL

FINGERPRINTING AND PROCESS CONTROL OF PHOTOSENSITIVE FILM DEPOSITIO...

METHODS AND SYSTEMS TO MEASURE PROPERTIES OF MOVING PRODUCTS IN DEV...

PECVD PROCESS

SPATIAL PATTERN LOADING MEASUREMENT WITH IMAGING METROLOGY

OPTICAL METROLOGY MODELS FOR IN-LINE FILM THICKNESS MEASUREMENTS

METHODS AND SYSTEMS TO MEASURE PROPERTIES OF PRODUCTS ON A MOVING B...

SPECTRUM SHAPING DEVICES AND TECHNIQUES FOR OPTICAL CHARACTERIZATIO...

PECVD PROCESS

OPTICAL STACK DEPOSITION AND ON-BOARD METROLOGY

METHODS, APPARATUSES AND SYSTEMS FOR CONDUCTIVE FILM LAYER THICKNES...

IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...

PECVD PROCESS

Monitoring System For Deposition And Method Of Operation Thereof

ENHANCED ILLUMINATION EFFICIENCY IN MASKLESS, PROGRAMMABLE OPTICAL...

PECVD PROCESS

ENDPOINT DETECTION FOR A CHAMBER CLEANING PROCESS

PECVD PROCESS

IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...

MONITORING SYSTEM FOR DEPOSITION AND METHOD OF OPERATION THEREOF

PECVD PROCESS

PECVD APPARATUS AND PROCESS

MEASUREMENT OF FILM THICKNESS ON AN ARBITRARY SUBSTRATE

ELECTROPLATING TOOL WITH FEEDBACK OF METAL THICKNESS DISTRIBUTION A...

FAST AND CONTINUOUS EDDY-CURRENT METROLOGY OF A CONDUCTIVE FILM

PECVD PROCESS

FILM MEASUREMENT

METHOD AND APPARATUS FOR THE FORMATION OF SOLAR CELLS WITH SELECTIV...

METROLOGY OF THIN FILM DEVICES USING AN ADDRESSABLE MICROMIRROR ARRAY

METROLOGY SYSTEM FOR IMAGING WORKPIECE SURFACES AT HIGH ROBOT TRANS...