Edward Yeh

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Removal of silicon oxynitride material using a wet chemical process...
- Patent number 6,727,166
- Issue date Apr 27, 2004
- Koninklijke Philips Electronics N.V.
- Edward Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for a consistent shallow trench etch profile
- Patent number 6,342,428
- Issue date Jan 29, 2002
- Philips Electronics North America Corp.
- Tammy Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated process for ashing resist and treating silicon after mas...
- Patent number 6,207,565
- Issue date Mar 27, 2001
- VLSI Technology, Inc.
- Edward K. Yeh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alternative plasma chemistry for enhanced photoresist removal
- Patent number 6,130,166
- Issue date Oct 10, 2000
- VLSI Technology, Inc.
- Edward Yeh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Selective etch shallow trench isolation barrier integrated circuit...
- Publication number 20050073021
- Publication date Apr 7, 2005
- Calvin Gabriel
- H01 - BASIC ELECTRIC ELEMENTS