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Edwin A. Arevalo
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Waltham, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Techniques for temperature-controlled ion implantation
Patent number
8,450,193
Issue date
May 28, 2013
Varian Semiconductor Equipment Associates, Inc.
Jonathan Gerald England
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation with heavy halogenide compounds
Patent number
7,927,986
Issue date
Apr 19, 2011
Varian Semiconductor Equipment Associates, Inc.
Ludovic Godet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques for forming shallow junctions
Patent number
7,642,150
Issue date
Jan 5, 2010
Varian Semiconductor Equipment Associates, Inc.
Edwin A. Arevalo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Athermal annealing with rapid thermal annealing system and method
Patent number
7,026,229
Issue date
Apr 11, 2006
Vartan Semiconductor Equipment Associates, Inc.
Daniel F. Downey
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Ion Implantation with Heavy Halogenide Compounds
Publication number
20100022076
Publication date
Jan 28, 2010
Varian Semiconductor Equipment Associates, Inc.
Ludovic Godet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ION IMPLANTATION PROCESS CONTROL USING REFLECTOMETRY
Publication number
20080318345
Publication date
Dec 25, 2008
Harold M. Persing
G01 - MEASURING TESTING
Information
Patent Application
TECHNIQUES FOR FORMING SHALLOW JUNCTIONS
Publication number
20080108208
Publication date
May 8, 2008
Varian Semiconductor Equipment Associates, Inc.
Edwin A. Arevalo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Technique for Improved Damage Control in a Plasma Doping (PLAD) Ion...
Publication number
20080090392
Publication date
Apr 17, 2008
Varian Semiconductor Equipment Associates, Inc.
Vikram Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR TEMPERATURE-CONTROLLED ION IMPLANTATION
Publication number
20080044257
Publication date
Feb 21, 2008
Varian Semiconductor Equipment Associates, Inc.
Jonathan Gerald ENGLAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Plasma Processing with In-Situ Monitoring and Process Par...
Publication number
20070224840
Publication date
Sep 27, 2007
Varian Semiconductor Equipment Associates, Inc.
Anthony Renau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and systems for dopant profiling
Publication number
20050260838
Publication date
Nov 24, 2005
Varian Semiconductor Equipment Associates, Inc.
Daniel F. Downey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and methods for junction formation using optical illumina...
Publication number
20040235281
Publication date
Nov 25, 2004
Daniel F. Downey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dopant diffusion and activation control with athermal annealing
Publication number
20030186519
Publication date
Oct 2, 2003
Daniel F. Downey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Athermal annealing with rapid thermal annealing system and method
Publication number
20030157813
Publication date
Aug 21, 2003
Daniel F. Downey
H01 - BASIC ELECTRIC ELEMENTS