Edwin C. Weldon

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reusable ceramic-comprising component which includes a scrificial s...
- Patent number 6,899,798
- Issue date May 31, 2005
- Applied Materials, Inc.
- Edwin Charles Weldon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck having composite dielectric layer and method of...
- Patent number 6,721,162
- Issue date Apr 13, 2004
- Applied Materials Inc.
- Edwin C. Weldon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber having improved temperature control
- Patent number 6,440,221
- Issue date Aug 27, 2002
- Applied Materials, Inc.
- Shamouil Shamouilian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric covered electrostatic chuck
- Patent number 6,414,834
- Issue date Jul 2, 2002
- Applied Materials, Inc.
- Edwin C. Weldon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber having improved gas distributor and method of manuf...
- Patent number 6,263,829
- Issue date Jul 24, 2001
- Applied Materials, Inc.
- Gerhard Schneider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermally conductive conformal media
- Patent number 6,220,607
- Issue date Apr 24, 2001
- Applied Materials, Inc.
- Gerhard M. Schneider
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck having improved gas conduits
- Patent number 6,108,189
- Issue date Aug 22, 2000
- Applied Materials, Inc.
- Edwin C. Weldon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Puncture resistant electrostatic chuck
- Patent number 5,986,875
- Issue date Nov 16, 1999
- Applied Materials, Inc.
- Arik Donde
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Conduits for flow of heat transfer fluid to the surface of an elect...
- Patent number 5,904,776
- Issue date May 18, 1999
- Applied Materials, Inc.
- Arik Donde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Puncture resistant electrostatic chuck
- Patent number 5,729,423
- Issue date Mar 17, 1998
- Applied Materials, Inc.
- Arik Donde
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Conduits for flow of heat transfer fluid to the surface of an elect...
- Patent number 5,720,818
- Issue date Feb 24, 1998
- Applied Materials, Inc.
- Arik Donde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic chuck having dielectric member with stacked layers an...
- Publication number 20040190215
- Publication date Sep 30, 2004
- APPLIED MATERIALS, INC.
- Edwin C. Weldon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laser drilled surfaces for substrate processing chambers
- Publication number 20030188685
- Publication date Oct 9, 2003
- APPLIED MATERIALS, INC.
- Hong Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods of roughening a ceramic surface
- Publication number 20030116276
- Publication date Jun 26, 2003
- Edwin Charles Weldon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrostatic chuck having composite dielectric layer and method of...
- Publication number 20020135969
- Publication date Sep 26, 2002
- APPLIED MATERIALS, INC.
- Edwin C. Weldon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER HAVING IMPROVED TEMPERATURE CONTROL
- Publication number 20010042594
- Publication date Nov 22, 2001
- SHAMOUIL SHAMOUILIAN
- H01 - BASIC ELECTRIC ELEMENTS

Edwin C. Weldon

Person

Patents Grantslast 30 patents

Reusable ceramic-comprising component which includes a scrificial s...

Electrostatic chuck having composite dielectric layer and method of...

Process chamber having improved temperature control

Dielectric covered electrostatic chuck

Process chamber having improved gas distributor and method of manuf...

Thermally conductive conformal media

Electrostatic chuck having improved gas conduits

Puncture resistant electrostatic chuck

Conduits for flow of heat transfer fluid to the surface of an elect...

Puncture resistant electrostatic chuck

Conduits for flow of heat transfer fluid to the surface of an elect...

Patents Applicationslast 30 patents

Electrostatic chuck having dielectric member with stacked layers an...

Laser drilled surfaces for substrate processing chambers

Methods of roughening a ceramic surface

Electrostatic chuck having composite dielectric layer and method of...

PROCESS CHAMBER HAVING IMPROVED TEMPERATURE CONTROL