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Edwin Johan Buis
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Belfeld, NL
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last 30 patents
Information
Patent Grant
Actuation mechanism, optical apparatus, lithography apparatus and m...
Patent number
9,785,051
Issue date
Oct 10, 2017
ASML Netherlands B.V.
Jan Bernard Plechelmus Van Schoot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Arrangement for the actuation of at least one element in an optical...
Patent number
9,651,772
Issue date
May 16, 2017
Carl Zeiss SMT GmbH
Markus Hauf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actuation mechanism, optical apparatus, lithography apparatus and m...
Patent number
9,494,878
Issue date
Nov 15, 2016
ASML Netherlands B.V.
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Planar motor and lithographic apparatus comprising such planar motor
Patent number
9,172,294
Issue date
Oct 27, 2015
ASML Netherlands B.V.
Sven Antoin Johan Hol
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Actuator
Patent number
9,136,151
Issue date
Sep 15, 2015
ASML Netherlands B.V.
Fredrik Wilhelm Van Der Blij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system, lithographic apparatus and method of adjusting...
Patent number
8,867,021
Issue date
Oct 21, 2014
ASML Netherlands B.V.
Gosse Charles De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical apparatus, and method of orienting a reflective element
Patent number
8,817,232
Issue date
Aug 26, 2014
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mountings for rotation of array of reflective elements and lithogra...
Patent number
8,757,823
Issue date
Jun 24, 2014
ASML Netherlands B.V.
Edwin Johan Buis
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and method
Patent number
8,724,081
Issue date
May 13, 2014
ASML Netherlands B.V.
Gosse Charles De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actuator system, lithographic apparatus, method of controlling the...
Patent number
8,634,062
Issue date
Jan 21, 2014
ASML Netherlands B.V.
Gosse Charles De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Object support positioning device and lithographic apparatus
Patent number
8,279,408
Issue date
Oct 2, 2012
ASML Netherlands B.V.
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with rotation filter device
Patent number
7,700,930
Issue date
Apr 20, 2010
ASML Netherlands B.V.
Edwin Johan Buis
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Lithographic apparatus, radiation system, device manufacturing meth...
Patent number
7,629,593
Issue date
Dec 8, 2009
ASML Netherlands B.V.
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Contamination prevention system, lithographic apparatus, radiation...
Patent number
7,602,472
Issue date
Oct 13, 2009
ASML Netherlands B.V.
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,518,705
Issue date
Apr 14, 2009
ASML Netherlands B.V.
Antonie Hendrik Verweij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,492,440
Issue date
Feb 17, 2009
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic support structure
Patent number
7,486,384
Issue date
Feb 3, 2009
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Lithographic apparatus, reticle masking device for a lithographic a...
Patent number
7,307,689
Issue date
Dec 11, 2007
ASML Netherlands B.V.
Maurice Philippe Du Mee
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Lithographic apparatus, device manufacturing method and positioning...
Patent number
7,224,429
Issue date
May 29, 2007
ASML Netherlands B.V.
Sven Antoin Johan Hol
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Lithographic actuator mechanism, lithographic apparatus, and device...
Patent number
7,088,428
Issue date
Aug 8, 2006
ASML Netherlands B.V.
Sven Antoin Johan Hol
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Cooling of voice coil motors
Patent number
7,057,313
Issue date
Jun 6, 2006
ASML Netherlands B.V.
Edwin J. Buis
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Lithographic apparatus, device manufacturing method and device manu...
Patent number
6,937,316
Issue date
Aug 30, 2005
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Lithographic apparatus, magnetic support for use therein, device ma...
Patent number
6,831,285
Issue date
Dec 14, 2004
ASML Netherlands B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cooling of voice coil motors in lithographic projection apparatus
Patent number
6,657,204
Issue date
Dec 2, 2003
ASML Netherlands B.V.
Edwin J. Buis
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Crash prevention in positioning apparatus for use in lithographic p...
Patent number
6,498,350
Issue date
Dec 24, 2002
ASML Netherlands B.V.
Yim Bun P. Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
DROPLET GENERATOR NOZZLE
Publication number
20220363596
Publication date
Nov 17, 2022
ASML NETHERLANDS B.V.
Dietmar Uwe Herbert Trees
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ARRANGEMENT FOR THE ACTUATION OF AT LEAST ONE ELEMENT IN AN OPTICAL...
Publication number
20150309305
Publication date
Oct 29, 2015
Carl Zeiss SMT GMBH
Markus Hauf
G02 - OPTICS
Information
Patent Application
ACTUATION MECHANISM, OPTICAL APPARATUS, LITHOGRAPHY APPARATUS AND M...
Publication number
20150277233
Publication date
Oct 1, 2015
ASML NETHERLANDS B.V.
Jan Bernard Plechelmus Van Schoot
G01 - MEASURING TESTING
Information
Patent Application
Actuation Mechanism, Optical Apparatus, Lithography Apparatus and M...
Publication number
20150261093
Publication date
Sep 17, 2015
ASML NETHERLANDS B.V.
Edwin Johan Buis
G02 - OPTICS
Information
Patent Application
PLANAR MOTOR AND LITHOGRAPHIC APPARATUS COMPRISING SUCH PLANAR MOTOR
Publication number
20120249991
Publication date
Oct 4, 2012
ASML NETHERLANDS B.V.
Sven Antoin Johan HOL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Actuator
Publication number
20120162628
Publication date
Jun 28, 2012
ASML NETHERLANDS B.V.
Fredrik Wilhelm Van Der Blij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF ADJUSTING...
Publication number
20120154777
Publication date
Jun 21, 2012
ASML NETHERLANDS B.V.
Gosse Charles De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL APPARATUS, AND METHOD OF ORIENTING A REFLECTIVE ELEMENT
Publication number
20120147345
Publication date
Jun 14, 2012
ASML NETHERLANDS B.V.
Edwin Johan Buis
G02 - OPTICS
Information
Patent Application
MOUNTINGS FOR ROTATION OF ARRAY OF REFLECTIVE ELEMENTS AND LITHOGRA...
Publication number
20120105989
Publication date
May 3, 2012
ASML NETHERLANDS B.V.
Edwin Johan Buis
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20110205516
Publication date
Aug 25, 2011
ASML NETHERLANDS B.V.
Gosse Charles De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Actuator System, Lithographic Apparatus, Method of Controlling the...
Publication number
20100149506
Publication date
Jun 17, 2010
ASML NETHERLANDS B.V.
Gosse Charles DE VRIES
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OBJECT SUPPORT POSITIONING DEVICE AND LITHOGRAPHIC APPARATUS
Publication number
20090323038
Publication date
Dec 31, 2009
ASML NETHERLANDS B.V.
Edwin Johan BUIS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus with rotation filter device
Publication number
20090073401
Publication date
Mar 19, 2009
ASML NETHERLANDS B.V.
Edwin Johan Buis
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Lithographic apparatus, radiation system, device manufacturing meth...
Publication number
20090001288
Publication date
Jan 1, 2009
ASML NETHERLANDS B.V.
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Contamination prevention system, lithographic apparatus, radiation...
Publication number
20080309893
Publication date
Dec 18, 2008
ASML NETHERLANDS B.V.
Edwin Johan Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic support structure
Publication number
20080297758
Publication date
Dec 4, 2008
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus Tinnemans
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080070353
Publication date
Mar 20, 2008
ASML NETHERLANDS B.V.
Antonie Hendrik Verweij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, reticle masking device for a lithographic a...
Publication number
20060139615
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Maurice Philippe Du Mee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060049698
Publication date
Mar 9, 2006
ASML NETHERLANDS B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and positioning...
Publication number
20050146698
Publication date
Jul 7, 2005
ASML NETHERLANDS B.V.
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cooling of voice coil motors
Publication number
20050056792
Publication date
Mar 17, 2005
ASML NETHERLANDS B.V.
Edwin J. Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic support structure
Publication number
20040246459
Publication date
Dec 9, 2004
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus Tinnemans
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Cooling of voice coil motors in lithographic projection apparatus
Publication number
20040079898
Publication date
Apr 29, 2004
ASML NETHERLANDS B.V.
Edwin J. Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20030052284
Publication date
Mar 20, 2003
Sven Antoin Johan Hol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and device manu...
Publication number
20030048428
Publication date
Mar 13, 2003
Nicolaas Rudolf Kemper
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Cooling of voice coil motors in lithographic projection apparatus
Publication number
20010013580
Publication date
Aug 16, 2001
Edwin J. Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Crash prevention in positioning apparatus for use in lithographic p...
Publication number
20010004105
Publication date
Jun 21, 2001
Yim Bun P. Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY