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Edwin Sum
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Danville, CA, US
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last 30 patents
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Patent Grant
Methods and apparatus for reducing arcing during plasma processing
Patent number
7,501,161
Issue date
Mar 10, 2009
Applied Materials, Inc.
Li Hou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Methods and apparatus for reducing arcing during plasma processing
Publication number
20050266174
Publication date
Dec 1, 2005
Li Hou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...