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Edwin te Sligte
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Eindhoven, NL
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last 30 patents
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Patent Grant
Method for removing a contamination layer from an optical surface a...
Patent number
8,419,862
Issue date
Apr 16, 2013
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B08 - CLEANING
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last 30 patents
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Patent Application
Method for removing a contamination layer from an optical surface a...
Publication number
20100288302
Publication date
Nov 18, 2010
Dirk Heinrich Ehm
B08 - CLEANING