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Egbert Dirk Stam
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Veldhoven, NL
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last 30 patents
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Patent Grant
Lithographic apparatus, substrate table, and method for enhancing s...
Patent number
7,791,708
Issue date
Sep 7, 2010
ASML Netherlands B.V.
Michiel Puyt
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Lithographic Apparatus, Substrate Table, and Method for Enhancing S...
Publication number
20100296073
Publication date
Nov 25, 2010
ASML NETHERLANDS B.V.
Michiel PUYT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Lithographic apparatus, substrate table, and method for enhancing s...
Publication number
20080158538
Publication date
Jul 3, 2008
ASML NETHERLANDS B.V.
Michiel Puyt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY